Metal contact capacitive switch on low-resistivity silicon wafer
2006 ◽
Vol 127
(1)
◽
pp. 24-30
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2016 ◽
Vol 147
◽
pp. 171-176
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Keyword(s):
1988 ◽
Vol 49
(C4)
◽
pp. C4-453-C4-456
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2020 ◽
Vol 25
(3)
◽
pp. 415-423
2020 ◽
Vol 140
(7)
◽
pp. 152-157