Integrated RF-MEMS switch based on a combination of thermal and electrostatic actuation

Author(s):  
P. Robert ◽  
D. Saias ◽  
C. Billard ◽  
S. Boret ◽  
N. Sillon ◽  
...  
2005 ◽  
Author(s):  
T. Seki ◽  
Y. Uno ◽  
K. Narise ◽  
T. Masuda ◽  
K. Inoue ◽  
...  

Author(s):  
Hartono Sumali ◽  
Jaron D. Kuppers ◽  
David A. Czaplewski ◽  
Jordan E. Massad ◽  
Christopher W. Dyck

The radio-frequency micro-electromechanical system (RF MEMS) switch comprises a plate suspended by four double-cantilever springs. When electrostatic actuation is applied, the plate moves toward the substrate and closes the switch. This article discusses how simulation and experimental methods improve the performance of the switch by suppressing mechanical rebounds and thus electrical signal discontinuities. To accurately simulate the mechanical motion of the switch, a high-fidelity three-dimensional finite element model is created to couple the solid dynamics with the electrostatic actuation. The displacement of the switch at various points is measured using a laser Doppler velocimeter through a microscope. The operational deflection shapes agree with the model. The three-dimensional model produces the necessary information for an effective one-dimensional model. The latter model is used to calculate an actuation voltage waveform to minimize switch velocity at closure, thereby suppressing switch rebound. The waveforms can be refined experimentally to compensate for switch property variations. Laboratory tests indicate that the waveform suppresses or eliminates rebound events.


Micromachines ◽  
2021 ◽  
Vol 12 (11) ◽  
pp. 1389
Author(s):  
Yong Zhu ◽  
Jitendra Pal

The authors would like to update the Figure 3 and Figure 7 to the published paper [...]


2020 ◽  
Vol 12 ◽  
Author(s):  
Pampa Debnath ◽  
Ujjwal Mondal ◽  
Arpan Deyasi

Aim:: Computation of loss factors for one-bit RF MEMS switch over Ku, K and Ka-band for two different insulating substrates. Objective:: Numerical investigation of return loss, insertion loss, isolation loss are computed under both actuated and unactuated states for two different insulating substrates of the 1-bit RF MEMS switch, and corresponding up and down-capacitances are obtained. Methods:: The unique characteristics of a 1-bit RF MEMS switch of providing higher return loss under both actuated and unactuated states and also of isolation loss with negligible insertion loss makes it as a prime candidate for phase shifter application. This is presented in this manuscript with a keen focus on improvement capability by changing transmission line width, and also of overlap area; where dielectric constant of the substrate also plays a vital role. Results:: The present work exhibits very low down-capacitance over the spectrum whereas considerable amount of up-capacitance. Also when overall performance in terms of all loss parameters are considered, switch provides very low insertion loss, good return loss under actuated state and standard isolation loss. Conclusion:: Reduction of transmission line width of about 33% improved the performance of the switch by increasing isolation loss. Isolation loss of -40 dB is obtained at actuated condition in higher microwave spectra for SiO 2 at higher overlap area. Down capacitance of ~ 1dB is obtained which is novel as compared with other published literature. Moreover, a better combination of both return loss, isolation loss and insertion loss are reported in this present work compared with all other published data so far.


Author(s):  
Mehrdad Khodapanahandeh ◽  
Akbar Babaeihaselghobi ◽  
Habib Badri Ghavifekr

Author(s):  
K. Srinivasa Rao ◽  
Ch. Gopi Chand ◽  
Reshmi Maity ◽  
N. P. Maity ◽  
K. Girija Sravani

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