Low-loss RF MEMS metal-to-metal contact switch with CSP structure

2004 ◽  
Author(s):  
T. Seki ◽  
S. Sato ◽  
T. Masuda ◽  
I. Kimura ◽  
K. Imanaka
Keyword(s):  
Rf Mems ◽  
Metal Contact ◽  
Low Loss ◽  
Contact Switch

scholarly journals Cantilever Beam Metal-Contact MEMS Switch

2013 ◽  
Vol 2013 ◽  
pp. 1-4 ◽  
Author(s):  
Adel Saad Emhemmed ◽  
Abdulmagid A. Aburwein
Keyword(s):  
Cantilever Beam ◽  
Rf Mems ◽  
Spring Constant ◽  
Metal Contact ◽  
Rf Mems Switch ◽  
Microelectromechanical System ◽  
Mems Switch ◽  
Integrated Method ◽  
Beam Geometry ◽  
Contact Switch

We present a new design of a miniature RF microelectromechanical system (MEMS) metal-contact switch and investigate various aspects associated with lowering the pull-down voltage and overcoming the stiction problem. Lowering the pull-down voltage in this design is based on reducing the spring constant by changing the cantilever beam geometry of the RF MEMS switch, and the stiction problem is overcome by a simple integrated method using two tiny posts located on the substrate at the free end of the cantilever beam.

Development of a large-force low-loss metal-contact RF MEMS switch

2006 ◽  
Vol 132 (2) ◽  
pp. 683-688 ◽  
Author(s):  
T. Seki ◽  
Y. Uno ◽  
K. Narise ◽  
T. Masuda ◽  
K. Inoue ◽  
...  
Keyword(s):  
Rf Mems ◽  
Metal Contact ◽  
Low Loss ◽  
Rf Mems Switch ◽  
Mems Switch ◽  
Large Force

Performance of low-loss RF MEMS capacitive switches

1998 ◽  
Vol 8 (8) ◽  
pp. 269-271 ◽  
Author(s):  
C.L. Goldsmith ◽  
Zhimin Yao ◽  
S. Eshelman ◽  
D. Denniston
Keyword(s):  
Rf Mems ◽  
Capacitive Switches ◽  
Low Loss
Sign in / Sign up

Export Citation Format

Share Document