Silicon bulk micromachined accelerometer with simultaneous linear and angular sensitivity

2002 ◽  
Author(s):  
J. Mizuno ◽  
K. Nottmeyer ◽  
T. Kobayashi ◽  
K. Minami ◽  
M. Esashi
Keyword(s):  
Angular Sensitivity ◽  
Silicon Bulk

Case Study: Combined Dynamic Laser Stimulation and Static Emission Microscopy Techniques Applied to Scan Test Failure on Mixed Mode Device

2012 ◽  
Author(s):  
Magdalena Sienkiewicz ◽  
Philippe Rousseille
Keyword(s):  
Mixed Mode ◽  
Laser Stimulation ◽  
Scan Test ◽  
Silicon Bulk ◽  
Defect Localization ◽  
Emission Microscopy ◽  
Microscopy Techniques ◽  
Test Failure

Abstract This paper presents a case study on scan test reject in a mixed mode IC. It focuses on the smart use of combined mature FA techniques, such as Soft Defect Localization (SDL) and emission microscopy (EMMI), to localize a random scan test anomaly at the silicon bulk level.

scholarly journals Optimization of a Low-Power Chemoresistive Gas Sensor: Predictive Thermal Modelling and Mechanical Failure Analysis

Sensors ◽  
2021 ◽  
Vol 21 (3) ◽  
pp. 783 ◽  
Author(s):  
Andrea Gaiardo ◽  
David Novel ◽  
Elia Scattolo ◽  
Michele Crivellari ◽  
Antonino Picciotto ◽  
...  
Keyword(s):  
Low Power ◽  
Failure Analysis ◽  
Gas Sensors ◽  
High Performance ◽  
Gas Sensing ◽  
Mechanical Failure ◽  
Sensing Applications ◽  
Theoretical Approaches ◽  
Sensing Material ◽  
Silicon Bulk

The substrate plays a key role in chemoresistive gas sensors. It acts as mechanical support for the sensing material, hosts the heating element and, also, aids the sensing material in signal transduction. In recent years, a significant improvement in the substrate production process has been achieved, thanks to the advances in micro- and nanofabrication for micro-electro-mechanical system (MEMS) technologies. In addition, the use of innovative materials and smaller low-power consumption silicon microheaters led to the development of high-performance gas sensors. Various heater layouts were investigated to optimize the temperature distribution on the membrane, and a suspended membrane configuration was exploited to avoid heat loss by conduction through the silicon bulk. However, there is a lack of comprehensive studies focused on predictive models for the optimization of the thermal and mechanical properties of a microheater. In this work, three microheater layouts in three membrane sizes were developed using the microfabrication process. The performance of these devices was evaluated to predict their thermal and mechanical behaviors by using both experimental and theoretical approaches. Finally, a statistical method was employed to cross-correlate the thermal predictive model and the mechanical failure analysis, aiming at microheater design optimization for gas-sensing applications.

Angular Sensitivity Steering in CNT Electromagnetic Wave Detector

2017 ◽  
Vol 16 ◽  
pp. 1405-1408 ◽  
Author(s):  
Tatsuya Nobunaga ◽  
Yukihiro Tadokoro ◽  
Yutaka Ohno ◽  
Hiroya Tanaka
Keyword(s):  
Electromagnetic Wave ◽  
Angular Sensitivity ◽  
Wave Detector

Silicon Bulk Micromachined High Q Film Bulk Acoustic Resonator Devices with Mo/AlN/Mo Structures

2005 ◽  
Vol 69 (1) ◽  
pp. 323-332 ◽  
Author(s):  
Heechul Lee ◽  
Jaeyeong Park ◽  
Kyunghak Lee ◽  
Youngjoon Ko ◽  
Jonguk Bu
Keyword(s):  
Acoustic Resonator ◽  
High Q ◽  
Silicon Bulk ◽  
Film Bulk Acoustic Resonator ◽  
Film Bulk

scholarly journals Development of a silicon bulk radiation damage model for Sentaurus TCAD

2017 ◽  
Vol 874 ◽  
pp. 94-102
Author(s):  
Å. Folkestad ◽  
K. Akiba ◽  
M. van Beuzekom ◽  
E. Buchanan ◽  
P. Collins ◽  
...  
Keyword(s):  
Radiation Damage ◽  
Damage Model ◽  
Silicon Bulk
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