Efficient design and optimization of MEMS by integrating commercial simulation tools
1998 ◽
Vol 66
(1-3)
◽
pp. 15-20
◽
2013 ◽
Vol 176
◽
pp. 753-760
◽
2021 ◽
Vol 118
(21)
◽
pp. e2021922118
1997 ◽