In situ measurement of etch rate of single crystal silicon

Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) ◽

10.1109/sensor.1997.613750 ◽

1997 ◽

Cited By ~ 1

Author(s):

E. Steinsland ◽

T. Finstad ◽

A. Ferber ◽

A. Hanneborg

Keyword(s):

Single Crystal ◽

Etch Rate ◽

Single Crystal Silicon ◽

In Situ Measurement ◽

Crystal Silicon

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Surfactant Adsorption on Single-Crystal Silicon Surfaces in TMAH Solution: Orientation-Dependent Adsorption Detected by In Situ Infrared Spectroscopy

Journal of Microelectromechanical Systems ◽

10.1109/jmems.2009.2031688 ◽

2009 ◽

Vol 18 (6) ◽

pp. 1345-1356 ◽

Cited By ~ 45

Author(s):

P. Pal ◽

K. Sato ◽

M.A. Gosalvez ◽

Y. Kimura ◽

K-I. Ishibashi ◽

...

Keyword(s):

Infrared Spectroscopy ◽

Single Crystal ◽

Single Crystal Silicon ◽

Silicon Surfaces ◽

Surfactant Adsorption ◽

Crystal Silicon ◽

In Situ Infrared Spectroscopy ◽

Tmah Solution

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A novel MEMS stage for in-situ thermomechanical testing of single crystal silicon microbeams under bending

Extreme Mechanics Letters ◽

10.1016/j.eml.2018.06.009 ◽

2018 ◽

Vol 23 ◽

pp. 1-8 ◽

Cited By ~ 4

Author(s):

Mohamed Elhebeary ◽

M. Taher A. Saif

Keyword(s):

Single Crystal ◽

Single Crystal Silicon ◽

Crystal Silicon ◽

Thermomechanical Testing

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In situ AFM Investigation of Interfacial Morphology of Single Crystal Silicon Wafer Anode

Acta Physico-Chimica Sinica ◽

10.3866/pku.whxb201511132 ◽

2016 ◽

Vol 32 (1) ◽

pp. 283-289 ◽

Cited By ~ 1

Author(s):

Xing-Rui LIU ◽

◽

Hui-Juan YAN ◽

Dong WANG ◽

Li-Jun WAN

Keyword(s):

Single Crystal ◽

Silicon Wafer ◽

Single Crystal Silicon ◽

Crystal Silicon ◽

Single Crystal Silicon Wafer ◽

Interfacial Morphology

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T0302-2-6 In-situ TEM Experiment of Tensile Testing for Single-Crystal-Silicon Thin Film

The proceedings of the JSME annual meeting ◽

10.1299/jsmemecjo.2010.8.0_263 ◽

2010 ◽

Vol 2010.8 (0) ◽

pp. 263-264

Author(s):

Taeko ANDO ◽

Hidekazu Ishihara ◽

Masahiro Nakajima ◽

Shigeo Arai ◽

Toshio Fukuda ◽

...

Keyword(s):

Thin Film ◽

Single Crystal ◽

Tensile Testing ◽

Single Crystal Silicon ◽

In Situ Tem ◽

Silicon Thin Film ◽

Crystal Silicon

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Low temperature in-situ phosphorus doped single-crystal silicon emitters for application in SiGe HBTs

ICONIP '02. Proceedings of the 9th International Conference on Neural Information Processing. Computational Intelligence for the E-Age (IEEE Cat. No.02EX575) ◽

10.1109/smelec.2002.1217812 ◽

2004 ◽

Cited By ~ 1

Author(s):

A.I. Abdul-Rahim ◽

C.D. Marsh ◽

P. Ashburn ◽

G. Booker

Keyword(s):

Low Temperature ◽

Single Crystal ◽

Single Crystal Silicon ◽

Crystal Silicon ◽

Phosphorus Doped

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Physical and electrical characterization of in situ boron-doped single-crystal silicon films grown at 450°C using remote plasma-enhanced chemical vapor deposition

Thin Solid Films ◽

10.1016/0040-6090(92)90092-p ◽

1992 ◽

Vol 207 (1-2) ◽

pp. 12-14

Author(s):

B. Anthony ◽

T. Hsu ◽

R. Qian ◽

J. Irby ◽

D. Kinosky ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Single Crystal ◽

Vapor Deposition ◽

Single Crystal Silicon ◽

Electrical Characterization ◽

Chemical Vapor ◽

Crystal Silicon ◽

Boron Doped

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In Situ Study of Size and Temperature Dependent Brittle-to-Ductile Transition in Single Crystal Silicon

Advanced Functional Materials ◽

10.1002/adfm.201201992 ◽

2012 ◽

Vol 23 (6) ◽

pp. 713-719 ◽

Cited By ~ 38

Author(s):

Wonmo Kang ◽

M. Taher A. Saif

Keyword(s):

Single Crystal ◽

Single Crystal Silicon ◽

Temperature Dependent ◽

Crystal Silicon ◽

Brittle To Ductile Transition ◽

In Situ Study

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In situ characterization of formation and growth of high-pressure phases in single-crystal silicon during nanoindentation

Applied Physics A ◽

10.1007/s00339-016-9973-2 ◽

2016 ◽

Vol 122 (4) ◽

Cited By ~ 1

Author(s):

Hu Huang ◽

Jiwang Yan

Keyword(s):

High Pressure ◽

Single Crystal ◽

Single Crystal Silicon ◽

In Situ Characterization ◽

Crystal Silicon

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Etch rates of (100), (111) and (110) single-crystal silicon in TMAH measured in situ by laser reflectance interferometry

Sensors and Actuators A Physical ◽

10.1016/s0924-4247(00)00309-5 ◽

2000 ◽

Vol 86 (1-2) ◽

pp. 73-80 ◽

Cited By ~ 36

Author(s):

Elin Steinsland ◽

Terje Finstad ◽

Anders Hanneborg

Keyword(s):

Single Crystal ◽

Single Crystal Silicon ◽

Crystal Silicon ◽

Laser Reflectance ◽

Etch Rates

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Orientation-Dependent Etch Rate of Single Crystal Silicon Related to Etching Temperature.

Journal of the Japan Society for Precision Engineering ◽

10.2493/jjspe.61.547 ◽

1995 ◽

Vol 61 (4) ◽

pp. 547-551 ◽

Cited By ~ 8

Author(s):

Akira Koide ◽

Kazuo Sato ◽

Shinji Tanaka ◽

Shigeo Kato

Keyword(s):

Single Crystal ◽

Etch Rate ◽

Single Crystal Silicon ◽

Crystal Silicon

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