Low Power Micro Gas Sensor

2005 ◽  
Author(s):  
Duk-Dong Lee ◽  
Wan-Young Chung ◽  
Tae-Hoon Kim ◽  
Jong-Mu Baek
Keyword(s):  
Low Power ◽  
Gas Sensor ◽  
Micro Gas Sensor

scholarly journals Catalytic Micro Gas Sensor with Excellent Homogeneous Temperature Distribution and Low Power Consumption for Long-Term Stable Operation

Proceedings ◽  
2018 ◽  
Vol 2 (13) ◽  
pp. 927 ◽  
Author(s):  
Anmona Shabnam Pranti ◽  
Daniel Loof ◽  
Sebastian Kunz ◽  
Marcus Bäumer ◽  
Walter Lang
Keyword(s):  
Temperature Distribution ◽  
Low Power ◽  
Gas Sensor ◽  
Gas Flow ◽  
Pt Nanoparticles ◽  
Stable Operation ◽  
Catalytic Layer ◽  
Micro Gas Sensor ◽  
Homogeneous Temperature

This paper presents a long-term stable thermoelectric micro gas sensor with ligand linked Pt nanoparticles as catalyst. The sensor design gives an excellent homogeneous temperature distribution over the catalytic layer, an important factor for long-term stability. The sensor consumes very low power, 18 mW at 100 °C heater temperature. Another thermoresistive sensor is also fabricated with same material for comparative analysis. The thermoelectric sensor gives better temperature homogeneity and consumes 23% less power than thermoresistive sensor for same average temperature on the membrane. The sensor shows linear characteristics with temperature change and has significantly high Seebeck coefficient of 6.5 mV/K. The output of the sensor remains completely constant under 15,000 ppm continuous H2 gas flow for 24 h. No degradation of sensor signal for 24 h indicates no deactivation of catalytic layer over the time. The sensor is tested with 3 different amount of catalyst at 2 different operating temperatures under 6000 ppm and 15,000 ppm continuous H2 gas flow for 4 h. Sensor output is completely stable for 3 different amount of catalyst.

scholarly journals Fabrication and Characteristics of Micro Platform for Micro Gas Sensor with Low Power Consumption

2011 ◽  
Vol 20 (5) ◽  
pp. 317-321 ◽  
Author(s):  
Woong-Jin Jang ◽  
Kwang-Bum Park ◽  
In-Ho Kim ◽  
Soon-Sup Park ◽  
Hyo-Derk Park ◽  
...  
Keyword(s):  
Power Consumption ◽  
Low Power ◽  
Gas Sensor ◽  
Low Power Consumption ◽  
Micro Gas Sensor

High-response and low-power-consumption CO micro gas sensor based on nano-powders and a micro-heater

2012 ◽  
Vol 60 (2) ◽  
pp. 235-239 ◽  
Author(s):  
S. E. Moon ◽  
J. -W. Lee ◽  
N. -J. Choi ◽  
H. -K. Lee ◽  
W. S. Yang ◽  
...  
Keyword(s):  
Power Consumption ◽  
Low Power ◽  
Gas Sensor ◽  
High Response ◽  
Low Power Consumption ◽  
Micro Gas Sensor

Low Power Consumption and High Sensitive NO2 Micro Gas Sensor based on Co-planar Micro-heater fabricated by using CMOS-MEMS Process

2010 ◽  
Vol 56 (1(2)) ◽  
pp. 434-438 ◽  
Author(s):  
Seung Eon Moon ◽  
J.-W. Lee ◽  
S.-J. Park ◽  
J. Park ◽  
K.-H. Park ◽  
...  
Keyword(s):  
Power Consumption ◽  
Low Power ◽  
Gas Sensor ◽  
Low Power Consumption ◽  
Micro Gas Sensor ◽  
Cmos Mems ◽  
Mems Process

Au-loaded In2O3 nanofibers-based ethanol micro gas sensor with low power consumption

2011 ◽  
Vol 160 (1) ◽  
pp. 713-719 ◽  
Author(s):  
Xiujuan Xu ◽  
Huitao Fan ◽  
Yantong Liu ◽  
Lijie Wang ◽  
Tong Zhang
Keyword(s):  
Power Consumption ◽  
Low Power ◽  
Gas Sensor ◽  
Low Power Consumption ◽  
Micro Gas Sensor

Low-power micro gas sensor

1996 ◽  
Vol 33 (1-3) ◽  
pp. 147-150 ◽  
Author(s):  
Duk-Dong Lee ◽  
Wan-Young Chung ◽  
Man-Sik Choi ◽  
Jong-Mu Baek
Keyword(s):  
Low Power ◽  
Gas Sensor ◽  
Micro Gas Sensor

Research of Low-Power MEMS-based Micro hotplates Gas Sensor: A Review

2021 ◽  
pp. 1-1
Author(s):  
Zhenyu Yuan ◽  
Fan Yang ◽  
Fanli Meng ◽  
Kaiyuan Zuo ◽  
Jin Li
Keyword(s):  
Low Power ◽  
Gas Sensor ◽  
Power Mems

Measurements of Residual Stress in the Layers of Thin Film Micro-Gas Sensors

2000 ◽  
Vol 657 ◽  
Author(s):  
Youngman Kim ◽  
Sung-Ho Choo
Keyword(s):  
Thin Film ◽  
Mechanical Properties ◽  
Residual Stress ◽  
Gas Sensor ◽  
Gas Sensors ◽  
Micro Gas Sensor ◽  
Thin Film Layer ◽  
Film Layer ◽  
The Difference ◽  
Stress States

ABSTRACTThe mechanical properties of thin film materials are known to be different from those of bulk materials, which are generally overlooked in practice. The difference in mechanical properties can be misleading in the estimation of residual stress states in micro-gas sensors with multi-layer structures during manufacturing and in service.In this study the residual stress of each film layer in a micro-gas sensor was measured according to the five difference sets of film stacking structure used for the sensor. The Pt thin film layer was found to have the highest tensile residual stress, which may affect the reliability of the micro-gas sensor. For the Pt layer the changes in residual stress were measured as a function of processing variables and thermal cycling.

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