A CMOS Compatible Traction Stress Sensing Element For Use In High Resolution Tactile Imaging

2005 ◽  
Author(s):  
B.J. Kane ◽  
G.T.A. Kovacs
Keyword(s):  
High Resolution ◽  
Sensing Element ◽  
Cmos Compatible ◽  
Stress Sensing ◽  
Tactile Imaging ◽  
Traction Stress

CMOS-compatible traction stress sensor for use in high-resolution tactile imaging

1996 ◽  
Vol 54 (1-3) ◽  
pp. 511-516 ◽  
Author(s):  
Bart J Kane ◽  
Mark R Cutkosky ◽  
Gregory T.A Kovacs
Keyword(s):  
High Resolution ◽  
Stress Sensor ◽  
Cmos Compatible ◽  
Tactile Imaging ◽  
Traction Stress

Application of Aligned Carbon Nanotubes in Micro Shear Stress Sensing

2004 ◽  
Author(s):  
Jason Clendenin ◽  
Husein Rokadia ◽  
Steve Tung ◽  
Konye Ogburia
Keyword(s):  
Shear Stress ◽  
Internal Flow ◽  
Surface Shear Stress ◽  
Sensing Element ◽  
Surface Shear ◽  
Stress Sensor ◽  
Sensing Applications ◽  
Shear Stress Sensor ◽  
Measured Resistance ◽  
Stress Sensing

This paper reports the development of a MEMS based aligned carbon nanotube, thermal surface shear stress sensor for micro shear stress sensing applications. This paper is focused on the theory of alignment of CNTs during sensing element fabrication as well as experimental and calibration results from sensor testing. It is found that CNTs can be routinely aligned between surface micromachined gold electrodes using AC dielectrophoresis to form shear stress sensing elements. In order to fabricate the sensing element, a 25 Vp-p electric field at 3 MHz was used to form a ~150 μm wide line of aligned CNTs. The measured resistance of the sensing element was 580 Ω. The fabricated CNT shear stress sensor has been tested by bonding a Plexiglas channel to the electrode chip in order to create a 2D internal flow. The CNT shear stress sensor was found to have an average TCR of −0.0112%/°C or −0.0691Ω/°C and a current to voltage ratio of 0.07 mA/V.

Development of a Dual-Axis Convective Gyroscope With Low Thermal-Induced Stress Sensing Element

2007 ◽  
Vol 16 (4) ◽  
pp. 950-958 ◽  
Author(s):  
Dzung Viet Dao ◽  
Van Thanh Dau ◽  
Tatsuo Shiozawa ◽  
Susumu Sugiyama
Keyword(s):  
Sensing Element ◽  
Induced Stress ◽  
Stress Sensing

Portable Piezospectroscopy system: non-contact in-situ stress sensing through high resolution photo-luminescent mapping

2014 ◽  
Vol 9 (11) ◽  
pp. P11005-P11005 ◽  
Author(s):  
I. Hanhan ◽  
E. Durnberg ◽  
G. Freihofer ◽  
P. Akin ◽  
S. Raghavan
Keyword(s):  
High Resolution ◽  
In Situ Stress ◽  
Photo Luminescent ◽  
Stress Sensing

A 2-DOF convective micro accelerometer with a low thermal stress sensing element

2007 ◽  
Vol 16 (6) ◽  
pp. 2308-2314 ◽  
Author(s):  
Van Thanh Dau ◽  
Dzung Viet Dao ◽  
Susumu Sugiyama
Keyword(s):  
Thermal Stress ◽  
Sensing Element ◽  
Stress Sensing ◽  
Micro Accelerometer

Ultrasensitive 2D ZnO Piezotronic Transistor Array for High Resolution Tactile Imaging

2017 ◽  
Vol 29 (16) ◽  
pp. 1606346 ◽  
Author(s):  
Shuhai Liu ◽  
Longfei Wang ◽  
Xiaolong Feng ◽  
Zheng Wang ◽  
Qi Xu ◽  
...  
Keyword(s):  
High Resolution ◽  
Tactile Imaging
Sign in / Sign up

Export Citation Format

Share Document