In situ XPS investigation of the chemical surface composition during the ALD of ultra-thin aluminum oxide films
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2014 ◽
Vol 05
(08)
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pp. 628-638
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2010 ◽
Vol 22
(7)
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pp. 661-667
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1964 ◽
Vol 3
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pp. 677-686
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2017 ◽
Vol 38
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pp. 1229-1236
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1983 ◽
Vol 44
(C10)
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pp. C10-191-C10-194
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1988 ◽
Vol 49
(C4)
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pp. C4-409-C4-412
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