Review on Process-Induced Strain Techniques for Advanced Logic Technologies

2007 15th International Conference on Advanced Thermal Processing of Semiconductors ◽

10.1109/rtp.2007.4383814 ◽

2007 ◽

Cited By ~ 6

Author(s):

M. Wiatr ◽

Th. Feudel ◽

A. Wei ◽

A. Mowry ◽

R. Boschke ◽

...

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