Effects of wafer emissivity on lightpipe radiometry in RTP tools

9th International Conference on Advanced Thermal Processing of Semiconductors, RTP 2001 ◽

10.1109/rtp.2001.1013761 ◽

2002 ◽

Author(s):

K.G. Kreider ◽

D.W. Allen ◽

D.H. Chen ◽

D.P. DeWitt ◽

C.W. Meyer ◽

...

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