Wet oxidation using single wafer furnace
Keyword(s):
2014 ◽
Vol 59
(4)
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pp. 1061-1076
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1998 ◽
1998 ◽
Vol 63
(11)
◽
pp. 1938-1944
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Keyword(s):
2002 ◽
Vol 41
(5)
◽
pp. 1166-1170
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Keyword(s):
2003 ◽
Vol 97
(1-3)
◽
pp. 257-265
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Keyword(s):