Closed-loop control of a base XY stage with rotational degree-of-freedom for a high-speed ultra-accurate manufacturing system
Keyword(s):
2014 ◽
Vol 989-994
◽
pp. 3062-3069
Keyword(s):
2010 ◽
Vol 139-141
◽
pp. 1852-1855
Keyword(s):
1993 ◽
pp. 293-306
1981 ◽
Vol 21
(3-4)
◽
pp. 217-225
Keyword(s):
1987 ◽
Vol 107
(2)
◽
pp. 271-278
2011 ◽
Vol 467-469
◽
pp. 978-983
Keyword(s):
2011 ◽
Vol 127
◽
pp. 126-129
Keyword(s):