Hybrid electrostatic/magnetic microactuators

2002 ◽  
Author(s):  
R. Holzer ◽  
I. Shimoyama ◽  
H. Miura
Keyword(s):  
Magnetic Microactuators

Magnetic Microactuators

1998 ◽  
pp. 95-126
Author(s):  
Massood Tabib-Azar
Keyword(s):  
Magnetic Microactuators

scholarly journals Magnetostrictive Performance of Electrodeposited TbxDy(1−x)Fey Thin Film with Microcantilever Structures

Micromachines ◽  
2020 ◽  
Vol 11 (5) ◽  
pp. 523
Author(s):  
Hang Shim ◽  
Kei Sakamoto ◽  
Naoki Inomata ◽  
Masaya Toda ◽  
Nguyen Van Toan ◽  
...  
Keyword(s):  
Magnetic Field ◽  
Thin Film ◽  
Aqueous Solution ◽  
Seed Layer ◽  
Magnetic Actuation ◽  
Magnetic Microactuators

The microfabrication with a magnetostrictive TbxDy(1−x)Fey thin film for magnetic microactuators is developed, and the magnetic and magnetostrictive actuation performances of the deposited thin film are evaluated. The magnetostrictive thin film of TbxDy(1−x)Fey is deposited on a metal seed layer by electrodeposition using a potentiostat in an aqueous solution. Bi-material cantilever structures with the Tb0.36Dy0.64Fe1.9 thin-film are fabricated using microfabrication, and the magnetic actuation performances are evaluated under the application of a magnetic field. The actuators show large magnetostriction coefficients of approximately 1250 ppm at a magnetic field of 11000 Oe.

Active fluid mixing with magnetic microactuators for capture of salmonella

2016 ◽  
Author(s):  
S. Hanasoge ◽  
D. Owen ◽  
M. Ballard ◽  
Z. Mills ◽  
J. Xu ◽  
...  
Keyword(s):  
Fluid Mixing ◽  
Active Fluid ◽  
Magnetic Microactuators
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