The effects of minute impurities (H, OH, F) on the SiO/sub 2//Si interface investigated by nuclear resonant reaction and electron spin resonance
1990 ◽
Vol 37
(7)
◽
pp. 1635-1642
◽
1988 ◽
1996 ◽
2007 ◽
2009 ◽
Vol 404
(23-24)
◽
pp. 4586-4589