Mask automation, film fabrication, and design automation in the BuWeps/NAFI thin-film technology

1964 ◽  
Vol 52 (12) ◽  
pp. 1472-1475
Author(s):  
J.F. McGinley ◽  
B.R. Glenn
2021 ◽  
Vol 201 ◽  
pp. 113914
Author(s):  
Alexandra L. Vyatskikh ◽  
Benjamin E. MacDonald ◽  
Alexander D. Dupuy ◽  
Enrique J. Lavernia ◽  
Julie M. Schoenung ◽  
...  

2021 ◽  
pp. 129657
Author(s):  
J.D. Gamez ◽  
H. Martínez-Sánchez ◽  
J.L. Valenzuela ◽  
L. Marín ◽  
L.A. Rodríguez ◽  
...  

2016 ◽  
Vol 28 ◽  
pp. 319-329 ◽  
Author(s):  
Alena S. Kalyakina ◽  
Valentina V. Utochnikova ◽  
Elena Yu. Sokolova ◽  
Andrey A. Vashchenko ◽  
Leonid S. Lepnev ◽  
...  

1992 ◽  
Vol 221 (1-2) ◽  
pp. 5-8 ◽  
Author(s):  
R.M. Faria ◽  
L.H.C. Mattoso ◽  
M. Ferreira ◽  
O.N. Oliveira ◽  
D. Gonçalves ◽  
...  

Author(s):  
E.L. Veera Prabakaran ◽  
K Senthil Vadivu ◽  
B Mouli Prasanth

Abstract Thin film sensors are used to monitor environmental conditions by measuring the physical parameters. By using thin film technology, the sensors are capable of conducting precise measurements. Moreover, the measurements are stable and dependable. Furthermore, inexpensive sensor devices can be produced. In this paper, thin film technology for the design and fabrication of sensors that are used in various applications is reviewed. Further, the applications of thin film sensors in the fields of biomedical, energy harvesting, optical, and corrosion applications are also presented. From the review, the future research needs and future perspectives are identified and discussed.


2011 ◽  
Vol 135-136 ◽  
pp. 484-486
Author(s):  
Xiao Wei Hou ◽  
Shi Bin Liu ◽  
Jie Chang

The main function of the substrate is to sustain and improve the performance of the thin-film. The property and surface configuration of the substrate material have a huge influence on the characteristics of the thin-film. Fabrication of substrate for the micro-transformer can choose a variety of materials, including the silicon, metal, glass, quartz, ceramics, plastics, polymer, etc. Different materials used as substrate have different effects on voltage gain and insertion loss of the transformer. At present, the silicon is used in most cases for its excellent properties. However, it is increasingly found that there exists some problems to gain better performance, such as the parasitic effect. And so, to employ other materials is essential. This paper discusses the effects induced by using different substrate materials. Through the analysis, a general cognition about how to choose the materials can be obtained, which is helpful to design and fabrication of the micro-transformer.


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