Characteristics of gas jet Z-pinch plasma light source for extreme ultraviolet lithography

2006 ◽  
Author(s):  
M. Watanabe ◽  
Inho Song ◽  
T. Sakamoto ◽  
Y. Kobayashi ◽  
N. Iizuka ◽  
...  
Keyword(s):  
Light Source ◽  
Extreme Ultraviolet ◽  
Gas Jet ◽  
Extreme Ultraviolet Lithography ◽  
Ultraviolet Lithography ◽  
Pinch Plasma ◽  
Z Pinch

Laser-produced plasma light source for extreme ultraviolet lithography

2013 ◽  
Vol 6 (1) ◽  
pp. 20-33
Author(s):  
窦银萍 DOU Yin-ping ◽  
孙长凯 SUN Chang-kai ◽  
林景全 LIN Jing-quan
Keyword(s):  
Light Source ◽  
Extreme Ultraviolet ◽  
Extreme Ultraviolet Lithography ◽  
Ultraviolet Lithography ◽  
Laser Produced Plasma

Research progress on laser-produced plasma light source for 13.5 nm extreme ultraviolet lithography

2020 ◽  
Vol 13 (1) ◽  
pp. 28-42
Author(s):  
宗 楠 ZONG Nan ◽  
胡蔚敏 HU Wei-min ◽  
王志敏 WANG Zhi-min ◽  
王小军 WANG Xiao-jun ◽  
张申金 ZHANG Shen-jin ◽  
...  
Keyword(s):  
Light Source ◽  
Extreme Ultraviolet ◽  
Research Progress ◽  
Extreme Ultraviolet Lithography ◽  
Ultraviolet Lithography ◽  
Laser Produced Plasma

Laser-Produced Plasma Light Source Development for Extreme Ultraviolet Lithography

2004 ◽  
Vol 43 (6B) ◽  
pp. 3707-3712 ◽  
Author(s):  
Hiroshi Komori ◽  
Georg Soumagne ◽  
Tamotsu Abe ◽  
Takashi Suganuma ◽  
Yousuke Imai ◽  
...  
Keyword(s):  
Light Source ◽  
Extreme Ultraviolet ◽  
Extreme Ultraviolet Lithography ◽  
Ultraviolet Lithography ◽  
Laser Produced Plasma

Extreme Ultraviolet Lithography Capabilities at the Advanced Light Source Using a 0.3-NA Optic

2006 ◽  
Vol 42 (1) ◽  
pp. 44-50 ◽  
Author(s):  
P. Naulleau ◽  
K.A. Goldberg ◽  
J.P. Cain ◽  
E.H. Anderson ◽  
K.R. Dean ◽  
...  
Keyword(s):  
Light Source ◽  
Extreme Ultraviolet ◽  
Extreme Ultraviolet Lithography ◽  
Ultraviolet Lithography ◽  
Advanced Light Source

Characteristics of Xenon Capillary Z-Pinch Extreme Ultraviolet Lithography Source Driven by DifferentdI/dtDischarge Current Pulses

2005 ◽  
Vol 44 (12) ◽  
pp. 8640-8645 ◽  
Author(s):  
Inho Song ◽  
Kazuhiro Iwata ◽  
Yusuke Homma ◽  
Smruti Ranjan Mohanty ◽  
Masato Watanabe ◽  
...  
Keyword(s):  
Extreme Ultraviolet ◽  
Extreme Ultraviolet Lithography ◽  
Ultraviolet Lithography ◽  
Current Pulses ◽  
Z Pinch
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