Modeling of a two stage RF plasma reactor for SiC deposition

2002 ◽  
Author(s):  
G.M. Petrov ◽  
J.L. Giuliani
Keyword(s):  
Plasma Reactor ◽  
Rf Plasma ◽  
Two Stage

Model of a two-stage rf plasma reactor for SiC deposition

2001 ◽  
Vol 90 (2) ◽  
pp. 619-636 ◽  
Author(s):  
G. M. Petrov ◽  
J. L. Giuliani
Keyword(s):  
Plasma Reactor ◽  
Rf Plasma ◽  
Two Stage

Phosgene formation from the decomposition of 1,1-C2H2Cl2 contained gas in an RF plasma reactor

1996 ◽  
Vol 48 (1-3) ◽  
pp. 51-67 ◽  
Author(s):  
Wen-Jhy Lee ◽  
Chuh-Yung Chen ◽  
Wen-Chang Lin ◽  
Ying-Tang Wang ◽  
Ching-Ju Chin
Keyword(s):  
Plasma Reactor ◽  
Rf Plasma

scholarly journals Fabrication and Characterization of Thermoresponsive Films Deposited by an RF Plasma Reactor

2010 ◽  
Vol 7 (12) ◽  
pp. 992-1000 ◽  
Author(s):  
Adrianne E. Lucero ◽  
Jamie A. Reed ◽  
Xiaomei Wu ◽  
Heather E. Canavan
Keyword(s):  
Plasma Reactor ◽  
Rf Plasma ◽  
Fabrication And Characterization

Effect of input power and feeding concentration on MTBE decomposition using an RF plasma reactor

2002 ◽  
Vol 77 (2) ◽  
pp. 195-204 ◽  
Author(s):  
Lien-Te Hsieh ◽  
Guor-Cheng Fang ◽  
Hsi-Hsien Yang ◽  
Ya-Fen Wang ◽  
Meng-Chun Tsao
Keyword(s):  
Plasma Reactor ◽  
Input Power ◽  
Rf Plasma ◽  
Mtbe Decomposition

Preparation of nanoscale amorphous silicon based powder in a square-wave-modulated rf plasma reactor

Vacuum ◽  
1994 ◽  
Vol 45 (10-11) ◽  
pp. 1115-1117 ◽  
Author(s):  
J Costa ◽  
G Sardin ◽  
J Campmany ◽  
E Bertran
Keyword(s):  
Amorphous Silicon ◽  
Plasma Reactor ◽  
Rf Plasma ◽  
Square Wave ◽  
Silicon Based

Dodecane Decomposition in a Radio-Frequency (RF) Plasma Reactor

2005 ◽  
Vol 3 (1) ◽  
Author(s):  
Laura Merlo-Sosa ◽  
Gervais Soucy
Keyword(s):  
Carbon Black ◽  
Plasma Reactor ◽  
Average Particle Size ◽  
Plasma Temperature ◽  
Experimental Results ◽  
Rf Plasma ◽  
Average Particle ◽  
Statistical Experimental Design ◽  
Operational Conditions ◽  
Carbon Molecules

The research outlined here includes a study of the production of carbon black (CB) in an inductive plasma reactor, using dodecane (C12H26) as the starting material. Thermodynamic and kinetic studies were carried out to predict the species concentrations likely to be obtained in the pyrolysis process at plasma temperatures. A thorough statistical experimental design was undertaken to investigate the influence of the different operational conditions such as: the feed rates of dodecane, the reactor pressure, the plate power applied to the plasma torch and the composition of the plasma gas, on the production of carbon black and gaseous acetylene-like compounds. Thermodynamic and kinetic models were compared with experimental results, a kinetic reaction model best representing the experimental results. Morphological analysis of the solid product using Transmission Electron Microscopy (TEM) indicates that a high plasma temperature is the most important factor affecting the final morphology of the carbon black formed during the reaction. Carbon black with average particle size of 10-30 nm and specific surface of 130 m2/g was obtained. Morphological analyses also demonstrated the presence of new structures ranging from carbon black to fullerenes and including certain “graphitized” carbon molecules.

Decomposition of CH3Cl/CO2 mixtures by using an RF plasma reactor

1997 ◽  
Vol 28 ◽  
pp. S519-S520 ◽  
Author(s):  
Lien-Te Hsieh ◽  
Wen-Jhy Lee ◽  
Chun-Yung Chen
Keyword(s):  
Plasma Reactor ◽  
Rf Plasma
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