Dynamics of sheaths in low pressure RF discharges

2003 ◽  
Author(s):  
M.A. Lieberman
Keyword(s):  
Low Pressure ◽  
Rf Discharges

scholarly journals RF discharges in low pressure gases with magnetic fields.

1985 ◽  
Vol 105 (11) ◽  
pp. 605-611 ◽  
Author(s):  
Yohji Hayashi ◽  
Tsutomu Katoh ◽  
Susumu Takeda
Keyword(s):  
Magnetic Fields ◽  
Low Pressure ◽  
Rf Discharges

Study on Initial Growth of Particles in Low-Pressure and Low-Power GeH4 RF Discharges Using the High-Sensitivity Photon-Counting Laser-Light-Scattering Method

1998 ◽  
Vol 37 (Part 2, No. 10B) ◽  
pp. L1264-L1267 ◽  
Author(s):  
Hiroharu Kawasaki ◽  
Kazutaka Sakamoto ◽  
Shinichi Maeda ◽  
Tsuyoshi Fukuzawa ◽  
Masaharu Shiratani ◽  
...  
Keyword(s):  
Light Scattering ◽  
Low Power ◽  
Laser Light ◽  
Photon Counting ◽  
High Sensitivity ◽  
Low Pressure ◽  
Laser Light Scattering ◽  
Scattering Method ◽  
Initial Growth ◽  
Rf Discharges
Sign in / Sign up

Export Citation Format

Share Document