Discrete-time control system design for a Reactive Ion Etching (RIE) system

Author(s):  
N. Tudoroiu ◽  
V. Yurkevich ◽  
K. Khorasani
Complexity ◽  
2020 ◽  
Vol 2020 ◽  
pp. 1-14 ◽  
Author(s):  
Ruobing Li ◽  
Quanmin Zhu ◽  
Janice Kiely ◽  
Weicun Zhang

To setup a universal proper user toolbox from previous individual research publications, this study generalises the algorithms for the U-model dynamic inversion based on the realisation of U-model from polynomial and state-space described continuous-time (CT) systems and presents the corresponding U-control system design in a systematic procedure. Then, it selects four CT dynamic plants plus a wind energy conversion system for simulation case studies in Matlab/Simulink to test/demonstrate the proposed U-model-based design procedure and dynamic inversion algorithms. This work can be treated as a U-control system design user manual in some sense.


Author(s):  
Q M Zhu ◽  
L Z Guo

In this study a control-oriented model is proposed to represent a wide range of non-linear discrete-time dynamic plants. As a testimony to the efficiency of the model structure for control system design, a pole placement controller is designed for non-linear discrete-time plants. Mathematically the solution of the controller output is converted into resolving a polynomial equation in the current control term u( t), which significantly reduces the difficulties encountered in non-linear control system synthesis and computational complexities. The integrated procedure provides a straightforward methodology to use in linear control system design techniques when designing non-linear control systems. For a demonstration of the effectiveness of the proposed methodology used to deal with practical problems, pole placement controllers are designed for three non-linear plants, including the Hammerstein model, a laboratory-scale liquid level system and a continuous stirred tank reactor. The simulation results are presented with graphical illustrations.


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