The experiment of applying a plasma chemical reaction and a nonplasma chemical reaction in the RF ion source
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1992 ◽
Vol 63
(4)
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pp. 2568-2570
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2007 ◽
Vol 52
(8)
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pp. 2841-2844
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2021 ◽
Vol 41
(2)
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pp. 531-557
1992 ◽
Vol 21
(12)
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pp. 693-699
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