Closed-loop phase control of an 8×8 MEMS mirror array via in-situ interferometry
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2018 ◽
Vol 42
(6)
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pp. 659-669
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2012 ◽
Vol 21
(08)
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pp. 1240027
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2002 ◽
Vol 62
(6)
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pp. 757-765
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1986 ◽
Vol 108
(2)
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pp. 117-122
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