Compact and Stress-Released Piston Tip-Tilt Mirror

IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006. ◽

10.1109/omems.2006.1708254 ◽

2006 ◽

Cited By ~ 1

Author(s):

W. Noell ◽

A. Hugi ◽

T. Overstolz ◽

S. Waldis ◽

R. Stanley ◽

...

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