PPMgLN ridge waveguide fabrication with low optical scattering loss using dry-etch process

2012 ◽  
Author(s):  
Tai-Young Kang ◽  
Jun-Hee Park ◽  
Tae-Ho Lim ◽  
Han-Young Lee ◽  
Kyung-Hwan Kim
Keyword(s):  
Ridge Waveguide ◽  
Optical Scattering ◽  
Scattering Loss ◽  
Waveguide Fabrication ◽  
Dry Etch

SOI waveguide fabrication process development using star coupler scattering loss measurements

2007 ◽  
Author(s):  
K. P. Yap ◽  
J. Lapointe ◽  
B. Lamontagne ◽  
A. Delâge ◽  
A. Bogdanov ◽  
...  
Keyword(s):  
Process Development ◽  
Fabrication Process ◽  
Scattering Loss ◽  
Waveguide Fabrication

The ridge waveguide fabrication with periodically poled MgO-doped lithium niobate for green laser

2007 ◽  
Vol 254 (4) ◽  
pp. 1101-1104 ◽  
Author(s):  
S.W. Kwon ◽  
W.S. Yang ◽  
H.M. Lee ◽  
W.K. Kim ◽  
H.-Y. Lee ◽  
...  
Keyword(s):  
Lithium Niobate ◽  
Green Laser ◽  
Ridge Waveguide ◽  
Periodically Poled ◽  
Waveguide Fabrication

Dry-etch of As2S3 thin films for optical waveguide fabrication

2005 ◽  
Vol 23 (6) ◽  
pp. 1626-1632 ◽  
Author(s):  
Weitang Li ◽  
Yinlan Ruan ◽  
Barry Luther-Davies ◽  
Andrei Rode ◽  
Rod Boswell
Keyword(s):  
Thin Films ◽  
Optical Waveguide ◽  
Waveguide Fabrication ◽  
Dry Etch

Deep dry-etch of silica in a helicon plasma etcher for optical waveguide fabrication

2005 ◽  
Vol 23 (1) ◽  
pp. 146-150 ◽  
Author(s):  
W. T. Li ◽  
D. A. P. Bulla ◽  
J. Love ◽  
B. Luther-Davies ◽  
C. Charles ◽  
...  
Keyword(s):  
Optical Waveguide ◽  
Helicon Plasma ◽  
Waveguide Fabrication ◽  
Dry Etch
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