IR Imaging at Room-temperature Using Substrate-free Micro-cantilever Array

2006 ◽  
Author(s):  
Chaobo Li ◽  
Binbin Jiao ◽  
Shali Shi ◽  
Tianchun Ye ◽  
Dapeng Chen ◽  
...  
Keyword(s):  
Room Temperature ◽  
Ir Imaging ◽  
Cantilever Array ◽  
Micro Cantilever

scholarly journals Optical-readout micro-cantilever array IR imaging system and performance analysis

2007 ◽  
Vol 56 (5) ◽  
pp. 2529
Author(s):  
Xiong Zhi_Ming ◽  
Zhang Qing_Chuan ◽  
Chen Da_Peng ◽  
Wu Xiao_Ping ◽  
Guo Zhe_Ying ◽  
...  
Keyword(s):  
Performance Analysis ◽  
Imaging System ◽  
Optical Readout ◽  
Ir Imaging ◽  
Cantilever Array ◽  
And Performance ◽  
Micro Cantilever

Modeling, Identification and Control of a Micro-cantilever Array

2013 ◽  
pp. 149-196
Author(s):  
Scott Cogan ◽  
Hui Hui ◽  
Michel Lenczner ◽  
Emmanuel Pillet ◽  
Nicolas Rattier ◽  
...  
Keyword(s):  
Cantilever Array ◽  
Micro Cantilever ◽  
And Control

Uncooled infrared imaging device based on optimized optomechanical micro-cantilever array

2008 ◽  
Vol 108 (6) ◽  
pp. 579-588 ◽  
Author(s):  
Fengliang Dong ◽  
Qingchuan Zhang ◽  
Dapeng Chen ◽  
Zhengyu Miao ◽  
Zhiming Xiong ◽  
...  
Keyword(s):  
Infrared Imaging ◽  
Imaging Device ◽  
Cantilever Array ◽  
Micro Cantilever ◽  
Uncooled Infrared Imaging

scholarly journals Bi-material mircocantilever array room-temperature IR imaging

2006 ◽  
Vol 55 (7) ◽  
pp. 3208
Author(s):  
Miao Zheng-Yu ◽  
Zhang Qing-Chuan ◽  
Chen Da-Peng ◽  
Wu Xiao-Ping ◽  
Li Chao-Bo ◽  
...  
Keyword(s):  
Room Temperature ◽  
Ir Imaging

Development of Conductive Polymer Micro Cantilever for Conductivity Measurement

2008 ◽  
Author(s):  
Ping Du ◽  
Xi Lin ◽  
Xin Zhang
Keyword(s):  
Room Temperature ◽  
Redox State ◽  
Conductive Polymer ◽  
Single Layer ◽  
Conductivity Measurement ◽  
Conductivity Measurements ◽  
State Dependent ◽  
Micro Cantilever ◽  
Electrical Stimuli ◽  
The Relationship

Conductive polymers are an unusual class of organic materials that exhibit high electrical conductivity at room temperature. Some reduction or oxidation (redox) state dependent properties (conductivity, color, volume, permeability) can be easily controlled by electrical stimuli, which makes it possible to construct transistors, OLEDs, actuators and membranes. In this work, we focus on the actuator aspect, where the volume change relies on the ions and solvent flux. We synthesize the polypyrrole by electrochemical deposition and derive the relationship between the film thickness and the growth rate. We further develop a novel process to fabricate single layer micro cantilever structures for conductivity measurements. The conductivity of the final structure could achieve around 5.40 S/cm.

Optimized Optomechanical Micro-Cantilever Array for Uncooled Infrared Imaging

2007 ◽  
Vol 24 (12) ◽  
pp. 3362-3364 ◽  
Author(s):  
Dong Feng-Liang ◽  
Zhang Qing-Chuan ◽  
Chen Da-Peng ◽  
Miao Zheng-Yu ◽  
Xiong Zhi-Ming ◽  
...  
Keyword(s):  
Infrared Imaging ◽  
Cantilever Array ◽  
Micro Cantilever ◽  
Uncooled Infrared Imaging

Dynamic Characteristics Measurement of Silicon Micro-Cantilever in Low Temperature Environment

2011 ◽  
Vol 483 ◽  
pp. 18-22
Author(s):  
Dong Sheng She ◽  
Xiao Dong Wang ◽  
Xi Wen Zhang ◽  
Li Ding Wang
Keyword(s):  
Low Temperature ◽  
Room Temperature ◽  
Dynamic Testing ◽  
Laser Doppler Vibrometer ◽  
Impact Excitation ◽  
Testing System ◽  
Resonance Frequencies ◽  
Temperature Environment ◽  
Micro Cantilever ◽  
Driving Source

The dynamic testing system for MEMS in low temperature environment has been developed. A thermoelectric cooling refrigerator was utilized to generate the low temperature environment. The base excitation device was established using the piezoelectric ceramic as the driving source. A vacuum chamber was designed to protect the micro-structure from the humid air. Through the base impact excitation, the resonance frequencies are obtained by analyzing the impulse response signals. The frequency response of micro-cantilever was obtained by using both BIST method and laser Doppler vibrometer. The dynamic testing experiments for the silicon micro-cantilever were carried out from -50°C to room temperature. The result shows that the resonance frequency slightly increases with the decreasing temperature. The measurement device is effective to carry out dynamic testing of microstructure from -50°C to room temperature.

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