Electrodynamic characterization of a cavity-type microwave plasma source

2017 ◽  
Author(s):  
Robert Miotk ◽  
Mariusz Jasinski ◽  
Jerzy Mizeraczyk
Keyword(s):  
Microwave Plasma ◽  
Plasma Source

Characterization of a slot antenna microwave plasma source for hydrogen plasma cleaning

1995 ◽  
Vol 13 (4) ◽  
pp. 2074-2085 ◽  
Author(s):  
D. Korzec ◽  
F. Werner ◽  
A. Brockhaus ◽  
J. Engemann ◽  
T. P. Schneider ◽  
...  
Keyword(s):  
Microwave Plasma ◽  
Hydrogen Plasma ◽  
Plasma Source ◽  
Slot Antenna ◽  
Plasma Cleaning

scholarly journals Design and Characterization of a Microwave Plasma Source Using a Rectangular Resonant Cavity

2008 ◽  
Vol 17 (5) ◽  
pp. 408-418 ◽  
Author(s):  
H.T. Kim ◽  
Y.S. Park ◽  
C.K. Sung ◽  
J.R. Yi ◽  
Y.S. Hwang
Keyword(s):  
Microwave Plasma ◽  
Resonant Cavity ◽  
Plasma Source

An Experimental Setup for IR Gas Radiative Property Measurements at Temperatures Up to 6000K: Application to CO2 and CO2-N2 Mixtures

2009 ◽  
Author(s):  
S. Depraz ◽  
A. Soufiani ◽  
M. Y. Perrin ◽  
Y. Babou
Keyword(s):  
Gas Flow ◽  
Microwave Plasma ◽  
Local Equilibrium ◽  
Emission Spectra ◽  
Plasma Source ◽  
Radiative Properties ◽  
Infrared Range ◽  
Gas Mixture ◽  
Experimental Setup

An experimental setup is developed to measure gaseous radiative properties at high temperature and is first applied to CO2 and CO2-N2 mixtures. The gas mixture is heated by a microwave discharge at atmospheric pressure. In a first step, a characterization of the plasma is performed through analysis of the emission spectra in the visible and near UV ranges. This characterization is performed very close to the exit of the plasma cavity where possible departure from local equilibrium is most likely to be observed. The gas flow is shown to be stable and close to local thermodynamic equilibrium at temperatures up to 6000K. In a second step, a Fourier transform spectrometer (BOMEM DA8) with a resolution of up to 4.10−3 cm−1 is associated with the microwave plasma source to perform emission measurements in the infrared range in order to study the infrared properties of CO2. These measurements are carried out farther away from the exit where the gas mixture is at lower temperatures with a significant concentration of CO2. Temperature measurements are derived from Abel inverted CO overtone emission spectra (Δv = 2) and, as preliminary results, CO2 emission measurements in the 2.7 μm range are compared to calculations.

Characterization of the slot antenna microwave plasma source

2001 ◽  
Vol 29 (1) ◽  
pp. 13-18 ◽  
Author(s):  
Cong-Feng Wu ◽  
Ru-Juan Zhan ◽  
Xiao-Hui Wen ◽  
Wei-Dong Huang
Keyword(s):  
Microwave Plasma ◽  
Plasma Source ◽  
Slot Antenna

Selective deposition and luminescence characterization of Eu-doped Y[sub 2]O[sub 3] nanoparticles by microwave plasma synthesis

1998 ◽  
Vol 6 (3) ◽  
pp. 143 ◽  
Author(s):  
P. D. Milewski ◽  
S. K. Streiffer ◽  
A. I. Kingon ◽  
I. K. Shmagin ◽  
R. M. Kolbas ◽  
...  
Keyword(s):  
Microwave Plasma ◽  
Plasma Synthesis ◽  
Selective Deposition ◽  
Microwave Plasma Synthesis

scholarly journals Merits of microwave plasmas for optical emission spectrometry – characterization of an axially viewed microwave-sustained, inductively coupled, atmospheric-pressure plasma (MICAP)

2020 ◽  
Vol 35 (10) ◽  
pp. 2369-2377
Author(s):  
Helmar Wiltsche ◽  
Matthias Wolfgang
Keyword(s):  
Atmospheric Pressure ◽  
Atmospheric Pressure Plasma ◽  
Optical Emission ◽  
Plasma Source ◽  
Optical Emission Spectrometry ◽  
Emission Spectrometry ◽  
Icp Oes ◽  
Microwave Plasmas ◽  
Inductively Coupled

The MICAP is a microwave driven plasma source employing nitrogen as the plasma gas. In this work we compare LODs and LOQs obtained in axial viewing with those obtained by ICP-OES and evaluate the effect of air instead of nitrogen as the plasma gas.

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