Thin film diamond-like carbon dielectrics

2003 ◽  
Author(s):  
R.L.C. Wu ◽  
H. Kosai ◽  
M. Freeman ◽  
G.E. Schwarze ◽  
S.F. Carr ◽  
...  
Keyword(s):  
Thin Film ◽  
Diamond Like Carbon

Effect of voltage on diamond-like carbon thin film using linear ion source

2014 ◽  
Vol 243 ◽  
pp. 15-19 ◽  
Author(s):  
Wang Ryeol Kim ◽  
Min Seok Park ◽  
Uoo Chang Jung ◽  
Ah Ram Kwon ◽  
Yong Whan Kim ◽  
...  
Keyword(s):  
Thin Film ◽  
Ion Source ◽  
Diamond Like Carbon ◽  
Carbon Thin Film

Diamond-like carbon (DLC) thin film bioelectrodes: Effect of thermal post-treatments and the use of Ti adhesion layer

2014 ◽  
Vol 34 ◽  
pp. 446-454 ◽  
Author(s):  
Tomi Laurila ◽  
Antti Rautiainen ◽  
Sakari Sintonen ◽  
Hua Jiang ◽  
Emilia Kaivosoja ◽  
...  
Keyword(s):  
Thin Film ◽  
Diamond Like Carbon ◽  
Adhesion Layer

Effects of fluorine incorporation on the structural and electrical properties of Diamond-like carbon

2015 ◽  
Vol 1734 ◽  
Author(s):  
Kento Nakanishi ◽  
Jun Otsuka ◽  
Masanori Hiratsuka ◽  
Chen Chung Du ◽  
Akira Shirakura ◽  
...  
Keyword(s):  
Thin Film ◽  
Solar Cells ◽  
Electrical Properties ◽  
Flow Rate ◽  
Gas Flow ◽  
Diamond Like Carbon ◽  
Gas Flow Rate ◽  
Sheet Resistivity ◽  
Nitrogen Doped ◽  
Structural And Electrical Properties

ABSTRACTDiamond-like carbon (DLC) has widespread attention as a new material for its application to thin film solar cells and other semiconducting devices. DLC can be produced at a lower cost than amorphous silicon, which is utilized for solar cells today. However, the electrical properties of DLC are insufficient for this purpose because of many dangling bonds in DLC. To solve this problem, we investigated the effects of the fluorine incorporation on the structural and electrical properties of DLC.We prepared five kinds of fluorinated DLC (F-DLC) thin film with different amounts of fluorine. Films were deposited by the radio-frequency plasma enhanced chemical vapor deposition (RF-PECVD) method. C6H6 and C6HF5 were used as source gases. The total gas flow rate was constant and the gas flow rate ratio R (=C6H6 / (C6H6 + C6HF5)) was changed from 0 to 1 in 0.25 ratio steps. We also prepared nitrogen doped DLC (F-DLC) on p-Si using N2 gas as a doping gas to form nitrogen doped DLC (F-DLC) / p-Si heterojunction diodes.X-ray photoelectron spectroscopy (XPS) showed that fluorine concentration in the DLC films was controlled. Moreover, the XPS analysis of the C1s spectrum at R=2/4 showed the presence of CF bonding. At R=1, CF2 bonding was observed in addition to CF bonding. The sheet resistivity of the films changed from 3.07×1012 to 4.86×109 Ω. The minimum value was obtained at R=2/4. The current-voltage characteristics indicated that nitrogen doped F-DLC of 2/4 and p-Si heterojunction diode exhibited the best rectification characteristics and its energy conversion efficiency had been maximized. This is because of a decrease of dangling bonds density by ESR analysis and an increase of sp2 structures by Raman analysis. When the fluorine is over certain content, the sheet resistivity increases because chain structures become larger, which is due to the CF2 bonding in F-DLC prevents ring structures. Many C2F4 species were observed and it may become precursors of the chain structure domains, such as (CF2)n.In this study, we revealed effects of fluorine incorporation on DLC and succeeded in increasing its conductivity and improving rectification characteristics of DLC/ p-Si hetero-junction diodes. Our results indicate that DLC fluorination is effective for the semiconducting material, such as solar cell applications.

Properties of Diamond-Like Carbon for Thin Film Microcathodes for Field Emission Displays

1996 ◽  
Vol 424 ◽  
Author(s):  
J Robertson ◽  
W I Milne
Keyword(s):  
Thin Film ◽  
Field Emission ◽  
Electron Affinity ◽  
Diamond Like Carbon ◽  
Emission Properties ◽  
Field Emission Properties ◽  
Field Emission Displays ◽  
Chemical Inertness ◽  
Strong Candidate

AbstractDiamond-like carbon is a strong candidate for field emission microcathodes for field emission displays because of its low electron affinity and chemical inertness. The field emission properties of various types of diamond-like carbon such as a-C:H and ta-C are reviewed in the framework of a bonding model of their affinity.

Deposition of diamond-like carbon

1993 ◽  
Vol 342 (1664) ◽  
pp. 277-286 ◽  
Keyword(s):  
Thin Film ◽  
Amorphous Carbon ◽  
Thin Film Deposition ◽  
Film Deposition ◽  
Diamond Like Carbon ◽  
Hydrogenated Amorphous Carbon ◽  
Sizeable Fraction ◽  
Deposition Processes ◽  
Hydrogenated Amorphous

Diamond-like carbon refers to forms of amorphous carbon and hydrogenated amorphous carbon containing a sizeable fraction of sp 3 bonding, which makes them mechanically hard, infrared transparent and chemically inert. This paper discusses the various thin film deposition processes used to form diamond-like carbon and the deposition mechanisms responsible for promoting the metastable sp 3 bonding.

Tensile Stress-Strain Properties of a-C:H (Diamond-Like Carbon) thin Films

1991 ◽  
Vol 239 ◽  
Author(s):  
Paul D. Garrett ◽  
Brian K. Daniels
Keyword(s):  
Thin Film ◽  
Tensile Stress ◽  
Rf Plasma ◽  
Diamond Like Carbon ◽  
Stress Strain ◽  
Film Coatings ◽  
Strain Behavior ◽  
Thin Film Coatings ◽  
Mode Of Failure

ABSTRACTFundamental mechanical properties of a-C:H (amorphous or “diamond-like” carbon, DLC) thin film coatings have been investigated. Coatings were deposited by a methane-argon RF plasma on polycarbonate films. Tensile stress-strain behavior of the coated polymer was studied using an extensometer to monitor strain. The differences in moduli between uncoated and coated samples were used to calculate apparent coating moduli, which varied from 1 GPA to 82 GPa. The mode of failure was observed via in-situ optical microscopy during deformation. Intrinsic bond strength of the coating/substrate interface was estimated from crack spacings in the deformed coating.

The Nanostructure Fabrication on Conductive Diamond-like Carbon Thin Film by Nano-Oxidation Technique

2014 ◽  
Vol 939 ◽  
pp. 671-678
Author(s):  
Jen Ching Huang ◽  
Ho Chang ◽  
Hui Ti Ling
Keyword(s):  
Thin Film ◽  
Atomic Force Microscope ◽  
Applied Voltage ◽  
Processing Parameters ◽  
Atmospheric Environment ◽  
High Wear Resistance ◽  
Mold Material ◽  
Diamond Like Carbon ◽  
Atomic Force ◽  
Carbon Thin Film

This paper mainly focuses in the use of an atomic force microscope, research about the nanooxidation technique of conductive diamond-like carbon thin film in the atmospheric environment. The hardness, high wear resistance and chemical stability of diamond-like carbon thin film is high, and coefficient of friction is low, it is very suitable as a mold material for nanoscale mold. However, tool can only use a diamond cutter to machine the high hardness diamond-like carbon by traditional hard machining method, and tool life is not long. To overcome this drawback, the paper proposed an atomic force microscope (AFM) as a platform, a conductive AFM probe for tool under atmospheric conditions, and imposed nanooxidation technique on conductive diamond-like carbon thin film using electroluminescent etching to carry out nanofabrication processing. During the nanofabrication process, by changing the various processing parameters, such as applied voltage, repeated nanooxidation times and probe speed, etc., in order to understand the effect of processing parameters. The experimental results show, the nanooxidation technique can be carried out nanofabrication on conductive diamond-like carbon thin film successfully. And found that applied voltage, repeated nanooxidation times and probe speed all for the groove depth on the conductive diamond-like carbon thin films have significant influence. Additionally, this study successfully created a nanopattern. Therefore, the adequate machinability of DLC coating was achieved successfully in this study, indicating a promising application in the fabrication of nanopatterns on a nanoscale.

Genetically optimized diamond-like carbon thin film coatings

2019 ◽  
Vol 34 (13) ◽  
pp. 1476-1487 ◽  
Author(s):  
Ranjan Kumar Ghadai ◽  
Kanak Kalita ◽  
Subhas Chandra Mondal ◽  
Bibhu Prasad Swain
Keyword(s):  
Thin Film ◽  
Diamond Like Carbon ◽  
Film Coatings ◽  
Thin Film Coatings ◽  
Carbon Thin Film
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