A low-voltage electrostatically actuated MEMS scanner for in vivo biomedical imaging
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2015 ◽
Vol 3
(5)
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pp. 748-758
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2019 ◽
Vol 14
(3)
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2011 ◽
Vol 133
(22)
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pp. 8617-8624
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Keyword(s):
2020 ◽
Vol 17
(173)
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pp. 20200774
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