scholarly journals Characterization and micro-assembly of electrostatic actuators for 3-DOF micromanipulators in laser phonomicrosurgery

2014 ◽  
Author(s):  
Eakkachai Pengwang ◽  
Kanty Rabenorosoa ◽  
Micky Rakotondrabe ◽  
Nicolas Andreff
Keyword(s):  
Electrostatic Actuators ◽  
Micro Assembly

Self‐sensing estimator for micromachined electrostatic actuators and parameters’ optimisation

2016 ◽  
Vol 11 (9) ◽  
pp. 528-531 ◽  
Author(s):  
Chong Li ◽  
Robert N. Dean ◽  
George T. Flowers
Keyword(s):  
Electrostatic Actuators

scholarly journals Coulomb-actuated microbeams revisited: experimental and numerical modal decomposition of the saddle-node bifurcation

2021 ◽  
Vol 7 (1) ◽  
Author(s):  
Anton Melnikov ◽  
Hermann A. G. Schenk ◽  
Jorge M. Monsalve ◽  
Franziska Wall ◽  
Michael Stolz ◽  
...  
Keyword(s):  
Finite Element ◽  
Microelectromechanical Systems ◽  
Dynamic Range ◽  
Dynamic Performance ◽  
Major Step ◽  
Element Analysis ◽  
Electrostatic Actuators ◽  
Voltage Range ◽  
Drive Voltage ◽  
Depth Analysis

AbstractElectrostatic micromechanical actuators have numerous applications in science and technology. In many applications, they are operated in a narrow frequency range close to resonance and at a drive voltage of low variation. Recently, new applications, such as microelectromechanical systems (MEMS) microspeakers (µSpeakers), have emerged that require operation over a wide frequency and dynamic range. Simulating the dynamic performance under such circumstances is still highly cumbersome. State-of-the-art finite element analysis struggles with pull-in instability and does not deliver the necessary information about unstable equilibrium states accordingly. Convincing lumped-parameter models amenable to direct physical interpretation are missing. This inhibits the indispensable in-depth analysis of the dynamic stability of such systems. In this paper, we take a major step towards mending the situation. By combining the finite element method (FEM) with an arc-length solver, we obtain the full bifurcation diagram for electrostatic actuators based on prismatic Euler-Bernoulli beams. A subsequent modal analysis then shows that within very narrow error margins, it is exclusively the lowest Euler-Bernoulli eigenmode that dominates the beam physics over the entire relevant drive voltage range. An experiment directly recording the deflection profile of a MEMS microbeam is performed and confirms the numerical findings with astonishing precision. This enables modeling the system using a single spatial degree of freedom.

scholarly journals Towards micro-assembly of hybrid MOEMS components on a reconfigurable silicon free-space micro-optical bench

2010 ◽  
Vol 20 (4) ◽  
pp. 045012 ◽  
Author(s):  
S Bargiel ◽  
K Rabenorosoa ◽  
C Clévy ◽  
C Gorecki ◽  
P Lutz
Keyword(s):  
Free Space ◽  
Optical Bench ◽  
Micro Assembly

On the effect of residual charges on the pull-in parameters of electrostatic actuators

2002 ◽  
Vol 97-98 ◽  
pp. 563-568 ◽  
Author(s):  
Ofir Bochobza-Degani ◽  
Eran Socher ◽  
Yael Nemirovsky
Keyword(s):  
Electrostatic Actuators

Micro-assembly using optically controlled bubble microrobots

2011 ◽  
Vol 99 (9) ◽  
pp. 094103 ◽  
Author(s):  
Wenqi Hu ◽  
Kelly S. Ishii ◽  
Aaron T. Ohta
Keyword(s):  
Micro Assembly
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