Chip-Level Thermoelectric Power Generators Based on High-Density Silicon Nanowire Array Prepared With Top-Down CMOS Technology

2011 ◽  
Vol 32 (5) ◽  
pp. 674-676 ◽  
Author(s):  
Y Li ◽  
K Buddharaju ◽  
N Singh ◽  
G Q Lo ◽  
S J Lee
Keyword(s):  
Thermoelectric Power ◽  
Silicon Nanowire ◽  
Nanowire Array ◽  
Cmos Technology ◽  
High Density ◽  
Top Down ◽  
Power Generators ◽  
Silicon Nanowire Array

scholarly journals High density core-shell silicon nanowire array for the realization of third generation solar cell

2011 ◽  
Vol 10 ◽  
pp. 33-37 ◽  
Author(s):  
Ludovic Dupré ◽  
Denis Buttard ◽  
Pascal Gentile ◽  
Nicolas Pauc ◽  
Amit Solanki
Keyword(s):  
Solar Cell ◽  
Silicon Nanowire ◽  
Nanowire Array ◽  
High Density ◽  
Core Shell ◽  
Third Generation ◽  
Silicon Nanowire Array

scholarly journals A Novel Top-Down Fabrication Process for Vertically-Stacked Silicon-Nanowire Array

2020 ◽  
Vol 10 (3) ◽  
pp. 1146 ◽  
Author(s):  
Kangil Kim ◽  
Jae Keun Lee ◽  
Seung Ju Han ◽  
Sangmin Lee
Keyword(s):  
Silicon Nanowires ◽  
Silicon Nanowire ◽  
Nanowire Array ◽  
Nanowire Arrays ◽  
Fabrication Method ◽  
Top Down ◽  
Silicon Nanowire Arrays ◽  
Sensing Applications ◽  
Silicon Nanowire Array ◽  
Cross Sectional Dimension

Silicon nanowires are widely used for sensing applications due to their outstanding mechanical, electrical, and optical properties. However, one of the major challenges involves introducing silicon-nanowire arrays to a specific layout location with reproducible and controllable dimensions. Indeed, for integration with microscale structures and circuits, a monolithic wafer-level process based on a top-down silicon-nanowire array fabrication method is essential. For sensors in various electromechanical and photoelectric applications, the need for silicon nanowires (as a functional building block) is increasing, and thus monolithic integration is highly required. In this paper, a novel top-down method for fabricating vertically-stacked silicon-nanowire arrays is presented. This method enables the fabrication of lateral silicon-nanowire arrays in a vertical direction, as well as the fabrication of an increased number of silicon nanowires on a finite dimension. The proposed fabrication method uses a number of processes: photolithography, deep reactive-ion etching, and wet oxidation. In applying the proposed method, a vertically-aligned silicon-nanowire array, in which a single layer consists of three vertical layers with 20 silicon nanowires, is fabricated and analyzed. The diamond-shaped cross-sectional dimension of a single silicon nanowire is approximately 300 nm in width and 20 μm in length. The developed method is expected to result in highly-sensitive, reproducible, and low-cost silicon-nanowire sensors for various biomedical applications.

scholarly journals High density micro-pyramids with silicon nanowire array for photovoltaic applications

2014 ◽  
Vol 25 (48) ◽  
pp. 485202 ◽  
Author(s):  
Tasmiat Rahman ◽  
Miguel Navarro-Cía ◽  
Kristel Fobelets
Keyword(s):  
Silicon Nanowire ◽  
Nanowire Array ◽  
High Density ◽  
Silicon Nanowire Array ◽  
Photovoltaic Applications

Terrace-confined guided growth of high-density ultrathin silicon nanowire array for large area electronics

2021 ◽  
Vol 32 (26) ◽  
pp. 265602
Author(s):  
Shun Xu ◽  
Ruijin Hu ◽  
Junzhuan Wang ◽  
Zheyang Li ◽  
Jun Xu ◽  
...  
Keyword(s):  
Silicon Nanowire ◽  
Nanowire Array ◽  
High Density ◽  
Large Area ◽  
Guided Growth ◽  
Silicon Nanowire Array ◽  
Large Area Electronics

scholarly journals Reusable Surface-Enhanced Raman Spectroscopy Substrates Made of Silicon Nanowire Array Coated with Silver Nanoparticles Fabricated by Metal-Assisted Chemical Etching and Photonic Reduction

Nanomaterials ◽  
2019 ◽  
Vol 9 (11) ◽  
pp. 1531 ◽  
Author(s):  
Shi Bai ◽  
Yongjun Du ◽  
Chunyan Wang ◽  
Jian Wu ◽  
Koji Sugioka
Keyword(s):  
Silver Nanoparticles ◽  
Chemical Etching ◽  
Silicon Nanowire ◽  
Nanowire Array ◽  
Surface Enhanced Raman Spectroscopy ◽  
Sers Substrate ◽  
Silicon Nanowire Array ◽  
Surface Enhanced ◽  
Surface Enhanced Raman ◽  
Metal Assisted Chemical Etching

Surface-enhanced Raman spectroscopy (SERS) has advanced over the last four decades and has become an attractive tool for highly sensitive analysis in fields such as medicine and environmental monitoring. Recently, there has been an urgent demand for reusable and long-lived SERS substrates as a means of reducing the costs associated with this technique To this end, we fabricated a SERS substrate comprising a silicon nanowire array coated with silver nanoparticles, using metal-assisted chemical etching followed by photonic reduction. The morphology and growth mechanism of the SERS substrate were carefully examined and the performance of the fabricated SERS substrate was tested using rhodamine 6G and dopamine hydrochloride. The data show that this new substrate provides an enhancement factor of nearly 1 × 108. This work demonstrates that a silicon nanowire array coated with silver nanoparticles is sensitive and sufficiently robust to allow repeated reuse. These results suggest that this newly developed technique could allow SERS to be used in many commercial applications.

An Electrochemical Glucose Biosensor with a Silicon Nanowire Array Electrode

2015 ◽  
Vol 162 (10) ◽  
pp. B264-B268 ◽  
Author(s):  
Che-Wei Hsu ◽  
Wen-Chao Feng ◽  
Fang-Ci Su ◽  
Gou-Jen Wang
Keyword(s):  
Silicon Nanowire ◽  
Nanowire Array ◽  
Glucose Biosensor ◽  
Array Electrode ◽  
Silicon Nanowire Array
Sign in / Sign up

Export Citation Format

Share Document