SONOS-type flash memory using an HfO/sub 2/ as a charge trapping layer deposited by the sol-gel spin-coating method
2006 ◽
Vol 27
(8)
◽
pp. 653-655
◽
Keyword(s):
Sol Gel
◽
2007 ◽
Vol 154
(4)
◽
pp. H268
◽