A Compact Angular Rate Sensor System Using a Fully Decoupled Silicon-on-Glass MEMS Gyroscope
2008 ◽
Vol 17
(6)
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pp. 1418-1429
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2000 ◽
Vol 84
(3)
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pp. 280-284
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2016 ◽
Vol 16
(11)
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pp. 4345-4353
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2017 ◽
Vol 232
(2)
◽
pp. 176-181
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Keyword(s):
2013 ◽
Vol 562-565
◽
pp. 417-420
Keyword(s):
Keyword(s):