Residual Stress Measurement on a MEMS Structure With High-Spatial Resolution
2007 ◽
Vol 16
(2)
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pp. 365-372
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2012 ◽
Vol 468-471
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pp. 476-479
2001 ◽
Vol 50
(7)
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pp. 713-718
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2015 ◽
Vol 659
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pp. 623-627
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2004 ◽
Vol 155-156
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pp. 1171-1177
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2006 ◽
Vol 41
(7)
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pp. 517-524
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