CMOS Compatible Integration of Three-Dimensional Microfluidic Systems Based on Low-Temperature Transfer of SU-8 Films
2006 ◽
Vol 15
(3)
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pp. 708-716
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2021 ◽
Vol 706
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pp. 012027
2005 ◽
Vol 89
(1)
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pp. 72-79
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1995 ◽
Vol 06
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pp. 317-373
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2011 ◽
Vol 189-193
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pp. 1132-1136
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2015 ◽
Vol 279
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pp. 54-59
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