Bulk-micromachined optical filter based on guided-mode resonance in silicon-nitride membrane

2006 ◽  
Vol 24 (4) ◽  
pp. 1922-1928 ◽  
Author(s):  
Che-Lung Hsu ◽  
Yung-Chih Liu ◽  
Chih-Ming Wang ◽  
Mount-Learn Wu ◽  
Ya-Lun Tsai ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Optical Filter ◽  
Silicon Nitride Membrane ◽  
Guided Mode ◽  
Guided Mode Resonance

Performance and Reliability of a MEMS-based tunable optical filter operating in the 1565 nm-1525 nm wavelength range

2002 ◽  
Vol 722 ◽  
Author(s):  
T. S. Sriram ◽  
B. Strauss ◽  
S. Pappas ◽  
A. Baliga ◽  
A. Jean ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Line Width ◽  
Insertion Loss ◽  
Optical Filter ◽  
Single Mode ◽  
Single Mode Fiber ◽  
Reliability Testing ◽  
Silicon Nitride Membrane ◽  
Tunable Optical Filter ◽  
Extensive Performance

AbstractThis paper describes the results of extensive performance and reliability characterization of a silicon-based surface micro-machined tunable optical filter. The device comprises a high-finesse Fabry-Perot etalon with one flat and one curved dielectric mirror. The curved mirror is mounted on an electrostatically actuated silicon nitride membrane tethered to the substrate using silicon nitride posts. A voltage applied to the membrane allows the device to be tuned by adjusting the length of the cavity. The device is coupled optically to an input and an output single mode fiber inside a hermetic package. Extensive performance characterization (over operating temperature range) was performed on the packaged device. Parameters characterized included tuning characteristics, insertion loss, filter line-width and side mode suppression ratio. Reliability testing was performed by subjecting the MEMS structure to a very large number of actuations at an elevated temperature both inside the package and on a test board. The MEMS structure was found to be extremely robust, running trillions of actuations without failures. Package level reliability testing conforming to Telcordia standards indicated that key device parameters including insertion loss, filter line-width and tuning characteristics did not change measurably over the duration of the test.

scholarly journals Wide wavelength range tunable one-dimensional silicon nitride nano-grating guided mode resonance filter based on azimuthal rotation

AIP Advances ◽  
2017 ◽  
Vol 7 (1) ◽  
pp. 015313 ◽  
Author(s):  
Ryoji Yukino ◽  
Pankaj K. Sahoo ◽  
Jaiyam Sharma ◽  
Tsukasa Takamura ◽  
Joby Joseph ◽  
...  
Keyword(s):  
Silicon Nitride ◽  
Wavelength Range ◽  
One Dimensional ◽  
Guided Mode ◽  
Wide Wavelength Range ◽  
Guided Mode Resonance

scholarly journals Optimization of tunable guided-mode resonance filter based on refractive index modulation of graphene

2019 ◽  
Vol 9 (1) ◽  
Author(s):  
Hwa-Seub Lee ◽  
Joon Young Kwak ◽  
Tae-Yeon Seong ◽  
Gyu Weon Hwang ◽  
Won Mok Kim ◽  
...  
Keyword(s):  
Near Infrared ◽  
Spectral Response ◽  
Extinction Ratio ◽  
Optical Filter ◽  
Optical Signal ◽  
Design Guidelines ◽  
Refractive Index Modulation ◽  
Guided Mode ◽  
Index Contrast ◽  
Guided Mode Resonance

AbstractTo fabricate a tunable optical filter with a fast response in the near infrared region, a tunable guided-mode resonance (GMR) filter using graphene was proposed and its performance was optimized. In this study, a rigorous coupled wave analysis method was employed to systematically investigate the effects of geometrical configuration of graphene-integrated GMR filters and the optical properties of constituent materials including graphene on their spectral response in terms of tunability and extinction ratio. It was found that as the graphene is located close to the waveguide and the evanescent-field strength at the interface increases, the GMR filter exhibits better tunability. The bandwidth of the filter could be drastically reduced by adopting a low-index contrast grating layer, so that the extinction ratio of an optical signal could be greatly improved from 0.91 dB to 27.99 dB as the index contrast decreased from 0.99 to 0.47, respectively. Furthermore, new practical device designs, that is easy to fabricate and effectively implement the electric-field doping of graphene at low gate voltage, were also suggested and theoretically validated. These results demonstrate not only the excellent potential of a graphene-based tunable GMR filter but also provide practical design guidelines for optimizing the device performance.

Enhanced light trapping in Ge-on-Si-on-insulator photodetector by guided mode resonance effect

2018 ◽  
Vol 124 (5) ◽  
pp. 053101
Author(s):  
Zhi Liu ◽  
Jietao Liu ◽  
Buwen Cheng ◽  
Jun Zheng ◽  
Chuanbo Li ◽  
...  
Keyword(s):  
Light Trapping ◽  
Resonance Effect ◽  
Guided Mode ◽  
Guided Mode Resonance
Sign in / Sign up

Export Citation Format

Share Document