GaBi Liquid Metal Alloy Ion Source for the Production of Ions of Interest in Microelectronics Research

2006 ◽  
Author(s):  
L. Bischoff ◽  
W. Pilz ◽  
Th. Ganetsos ◽  
R. Forbes ◽  
Ch. Akhmadaliev
Keyword(s):  
Liquid Metal ◽  
Ion Source ◽  
Metal Alloy ◽  
Liquid Metal Alloy

Liquid metal alloy ion source based metal ion injection into a room-temperature electron beam ion source

2012 ◽  
Vol 83 (2) ◽  
pp. 02A511 ◽  
Author(s):  
A. Thorn ◽  
E. Ritter ◽  
F. Ullmann ◽  
W. Pilz ◽  
L. Bischoff ◽  
...  
Keyword(s):  
Electron Beam ◽  
Liquid Metal ◽  
Metal Ion ◽  
Room Temperature ◽  
Ion Source ◽  
Metal Alloy ◽  
Ion Injection ◽  
Liquid Metal Alloy ◽  
Temperature Electron

scholarly journals Molecular ion implanter equipped with liquid-metal alloy ion source

2000 ◽  
Vol 71 (2) ◽  
pp. 780-782 ◽  
Author(s):  
Y. Gotoh ◽  
H. Tsuji ◽  
J. Ishikawa
Keyword(s):  
Liquid Metal ◽  
Ion Source ◽  
Metal Alloy ◽  
Molecular Ion ◽  
Liquid Metal Alloy

scholarly journals Imaging and milling resolution of light ion beams from helium ion microscopy and FIBs driven by liquid metal alloy ion sources

2020 ◽  
Vol 11 ◽  
pp. 1742-1749
Author(s):  
Nico Klingner ◽  
Gregor Hlawacek ◽  
Paul Mazarov ◽  
Wolfgang Pilz ◽  
Fabian Meyer ◽  
...  
Keyword(s):  
Liquid Metal ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Ion Beams ◽  
Ion Source ◽  
Metal Alloy ◽  
Gas Field ◽  
Helium Ion ◽  
Liquid Metal Alloy ◽  
Ion Species

While the application of focused ion beam (FIB) techniques has become a well-established technique in research and development for patterning and prototyping on the nanometer scale, there is still a large underused potential with respect to the usage of ion species other than gallium. Light ions in the range of m = 1–28 u (hydrogen to silicon) are of increasing interest due to the available high beam resolution in the nanometer range and their special chemical and physical behavior in the substrate. In this work, helium and neon ion beams from a helium ion microscope are compared with ion beams such as lithium, beryllium, boron, and silicon, obtained from a mass-separated FIB using a liquid metal alloy ion source (LMAIS) with respect to the imaging and milling resolution, as well as the current stability. Simulations were carried out to investigate whether the experimentally smallest ion-milled trenches are limited by the size of the collision cascade. While He+ offers, experimentally and in simulations, the smallest minimum trench width, light ion species such as Li+ or Be+ from a LMAIS offer higher milling rates and ion currents while outperforming the milling resolution of Ne+ from a gas field ion source. The comparison allows one to select the best possible ion species for the specific demands in terms of resolution, beam current, and volume to be drilled.

Temperature Dependence On The Emission Characteristics Of A AuGe Liquid Metal Alloy Ion Source

2007 ◽  
Author(s):  
Theodore Ganetsos ◽  
Lothar Bischoff ◽  
Wolfgang Pilz ◽  
Chavkat Akhmadaliev ◽  
Nikos Laskaris ◽  
...  
Keyword(s):  
Liquid Metal ◽  
Temperature Dependence ◽  
Ion Source ◽  
Metal Alloy ◽  
Emission Characteristics ◽  
Liquid Metal Alloy

Ultimate nanopatterning of Si substrate using filtered liquid metal alloy ion source-focused ion beam

2013 ◽  
Vol 543 ◽  
pp. 69-73 ◽  
Author(s):  
A. Benkouider ◽  
I. Berbezier ◽  
A. Ronda ◽  
L. Favre ◽  
E. Ruiz Gomes ◽  
...  
Keyword(s):  
Liquid Metal ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Ion Source ◽  
Metal Alloy ◽  
Si Substrate ◽  
Liquid Metal Alloy
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