Fabrication and characterization of Al gate n-MOSFET, on-chip fabricated with Si3N4 ISFET

Author(s):  
R Chaudhary ◽  
A Sharma ◽  
S Sinha ◽  
J Yadav ◽  
R Sharma ◽  
...  
2011 ◽  
Vol 1359 ◽  
Author(s):  
David W. Stollberg ◽  
Fabio Urbani ◽  
Amit Verma

ABSTRACTWe report the fabrication and characterization of a microstrip patch antenna composed entirely out of multi-walled carbon nanotubes on a silicon substrate. The antenna showed excellent response in the X-band, for which it was designed. In addition, an observed left-shift resonance effect points towards significant potential for miniaturization. The antenna also showed very promising reliability under different operating conditions. Such antennas may therefore have significant promise for system-on-chip, space application, and other specialized applications.


2010 ◽  
Vol 35 (22) ◽  
pp. 3829 ◽  
Author(s):  
Qiming Zhang ◽  
Ming Li ◽  
Qiang Hao ◽  
Dinghuan Deng ◽  
Hui Zhou ◽  
...  

Nanomaterials ◽  
2021 ◽  
Vol 11 (1) ◽  
pp. 117
Author(s):  
Liga Jasulaneca ◽  
Alexander I. Livshits ◽  
Raimonds Meija ◽  
Jelena Kosmaca ◽  
Raitis Sondors ◽  
...  

Electrostatically actuated nanoelectromechanical (NEM) switches hold promise for operation with sharply defined ON/OFF states, high ON/OFF current ratio, low OFF state power consumption, and a compact design. The present challenge for the development of nanoelectromechanical system (NEMS) technology is fabrication of single nanowire based NEM switches. In this work, we demonstrate the first application of CuO nanowires as NEM switch active elements. We develop bottom-up and top-down approaches for NEM switch fabrication, such as CuO nanowire synthesis, lithography, etching, dielectrophoretic alignment of nanowires on electrodes, and nanomanipulations for building devices that are suitable for scalable production. Theoretical modelling finds the device geometry that is necessary for volatile switching. The modelling results are validated by constructing gateless double-clamped and single-clamped devices on-chip that show robust and repeatable switching. The proposed design and fabrication route enable the scalable integration of bottom-up synthesized nanowires in NEMS.


2013 ◽  
Vol 193 ◽  
pp. 170-181 ◽  
Author(s):  
J. Martinez-Quijada ◽  
S. Caverhill-Godkewitsch ◽  
M. Reynolds ◽  
L. Gutierrez-Rivera ◽  
R.W. Johnstone ◽  
...  

2006 ◽  
Vol 951 ◽  
Author(s):  
Claire L. Callender ◽  
Patrick Dumais ◽  
Christopher J. Ledderhof ◽  
Julian P. Noad

ABSTRACTThe design, fabrication and characterization of liquid-filled microchannels embedded in silica layers and integrated with optical waveguides for applications in on-chip sensors and novel photonic devices are presented. These integrated microstructures are formed using plasma-enhanced chemical vapor deposition (PECVD), photolithography and reactive ion etching (RIE). Surface accessible fluid introduction ports have been developed, and microfluidic circuits including bends, T-junctions and splitters are demonstrated. Coupling of light from integrated solid silica waveguides via directional coupling or direct end-fire coupling into fluid filled channels has been achieved on-chip, and optical losses assessed experimentally and theoretically. Optimization of the microstructures for sensor applications and for novel photonic devices based on nonlinear and other optical properties of fluids in integrated liquid waveguide segments is discussed.


2009 ◽  
Vol 45 (10) ◽  
pp. 4767-4769 ◽  
Author(s):  
Jun-Yu Ou ◽  
Sen-Huei Chen ◽  
Huang-Ming Lee ◽  
Jong Ching Wu

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