Modelling and Simulation of Polysilicon Piezoresistors in CMOS-MEMS Resonator for Biomarker Detection in Exhaled Breath

2015 ◽  
Author(s):  
Almur Rabih ◽  
John Dennis ◽  
Haris Khir ◽  
Mawahib Abdalrahman ◽  
Abdelaziz Ahmed
Keyword(s):  
Modelling And Simulation ◽  
Exhaled Breath ◽  
Biomarker Detection ◽  
Mems Resonator ◽  
Cmos Mems

Characterization of CMOS-MEMS resonator by pulsed mode electrostatic actuation

2010 ◽  
Author(s):  
JL. Munoz-Gamarra ◽  
E. Marigo ◽  
J. Giner ◽  
A. Uranga ◽  
F. Torres ◽  
...  
Keyword(s):  
Electrostatic Actuation ◽  
Pulsed Mode ◽  
Mems Resonator ◽  
Cmos Mems

Theoretical modeling and FEA simulation of a CMOS-MEMS resonator

2017 ◽  
Author(s):  
A. Y. Ahmed ◽  
Almur. A. S. Rabih ◽  
M. H. Md Khir ◽  
A. M. A. Basuwaqi ◽  
J. O. Dennis
Keyword(s):  
Theoretical Modeling ◽  
Mems Resonator ◽  
Cmos Mems ◽  
Fea Simulation
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