In-depth description for the FA case with Gate-to-Source or Drain short by nanoprobing analysis

Proceedings of the 21th International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) ◽

10.1109/ipfa.2014.6898166 ◽

2014 ◽

Author(s):

Li Lung Lai ◽

Oscar Zhang ◽

Ling Zhu ◽

Feng Qian ◽

Mason Sun

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