Characterization of 2D dopant profiles for the design of proton implanted high-voltage superjunction
1985 ◽
Vol 320
(8)
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pp. 776-776
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1985 ◽
Vol 41
(4)
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pp. 340-347
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2016 ◽
Vol 7
(14)
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pp. 2671-2675
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Keyword(s):
2011 ◽
Vol 42
(9)
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pp. 1138-1147
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2018 ◽
Vol 38
(2)
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pp. 379-395
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Keyword(s):