Statistical and physical analysis of leakage and breakdown failure mechanisms of Cu/low-k interconnects

2005 ◽  
Author(s):  
Tam Lyn Tan ◽  
Hui Ping Lim ◽  
Chee Lip Gan ◽  
Nam Hwang
Keyword(s):  
Failure Mechanisms ◽  
Physical Analysis ◽  
Low K

Improved SRAM 6T Bit Cell Failure Analysis Using MCSpice Bit Cell Defect Modeling

2003 ◽  
Author(s):  
Randal Mulder ◽  
Sam Subramanian ◽  
Ed Widener ◽  
Tony Chrastecky
Keyword(s):  
Failure Analysis ◽  
Success Rate ◽  
Case Studies ◽  
Failure Mode ◽  
Failure Mechanisms ◽  
Physical Analysis ◽  
Certification Programs ◽  
Current Voltage ◽  
Electrical Analysis ◽  
Cell Defect

Abstract Single bit failures are the dominant failure mode for SRAM 6T bit cell memory devices. The analysis of failing single bits is aided by the fact that the mechanism is localized to the failing 6T bit cell. After electrically analyzing numerous failing bits, it was observed that failing bit cells were consistently producing specific electrical signatures (current-voltage curves). To help identify subtle bit cell failure mechanisms, this paper discusses an MCSpice program which was needed to simulate a 6T SRAM bit cell and the electrical analysis. It presents four case studies that show how MCSpice modeling of defective 6T SRAM bit cells was successfully used to identify subtle defect types (opens or shorts) and locations within the failing cell. The use of an MCSpice simulation and the appropriate physical analysis of defective bit cells resulted in a >90% success rate for finding failure mechanisms on yield and process certification programs.

Identification of a Non-LDD Induced Vt Shift Failure Mechanism via Nano-Probe Characterization

2010 ◽  
Author(s):  
Randal Mulder ◽  
Yuk Tsang
Keyword(s):  
Failure Mechanism ◽  
Threshold Voltage ◽  
Failure Mechanisms ◽  
Physical Analysis ◽  
Drive Current ◽  
Poly Silicon ◽  
Probe Analysis ◽  
Lightly Doped Drain ◽  
The Relationship

Abstract The relationship between blocked or depleted lightly doped drain (LDD) implants and threshold voltage (Vt) shifts resulting in suppressed drive current has been thoroughly investigated and characterized through nano-probe analysis. In this paper, a review for a technique for characterizing Vt shift failures is presented as well as a brief review of the LDD Vt shift failure. A case study is also presented showing the characterization, identification, and the physical analysis results for the symmetrical Vt shift failure mechanism. The method presented allows the analyst to differentiate between a Vt shift failure caused by a depleted LDD implant mechanism and a failure caused by dopant depletion in the gate poly-silicon. The results demonstrate that there are now at least two failure mechanisms that can be responsible for threshold voltage failures and it is likely that there are more that have yet to be discovered.

Atomic Force Probe Analysis of Nonvisible Defects in Sub-100nm CMOS Technologies

2006 ◽  
Author(s):  
Randal Mulder ◽  
Sam Subramanian ◽  
Tony Chrastecky
Keyword(s):  
Scanning Probe Microscopy ◽  
Failure Mechanisms ◽  
Electrical Characterization ◽  
Test Methods ◽  
Scanning Probe ◽  
Physical Analysis ◽  
Atomic Force ◽  
Transmission Electron ◽  
Minimum Number ◽  
Electrical Analysis

Abstract Traditional micro-probing and electrical characterization at the transistor level for sub-100nm technologies has become very difficult if not virtually impossible. Scanning probe microscopy technology specifically atomic force probing was developed in response to these issues with traditional micro-probing. The case studies presented in this paper demonstrate how atomic force probing was used to characterize failing sub-100nm transistors, identify possible failure mechanisms, and allow device/process engineers to make adjustments to the wafer fabrication process to correct the problem even though physical analysis with scanning election microscope/transmission electron microscope was not able to image and identify a failure mechanism. The probable causes for the transistor level failures are being identified through test methods, computer simulations, and electrical analysis by means of the atomic force probe after the failure has been sufficiently localized to a minimum number of transistors.

Modelling Electromigration and Stress Migration Damage in Advanced Interconnect Structures

1998 ◽  
Vol 516 ◽  
Author(s):  
Dirk Brown
Keyword(s):  
Statistical Models ◽  
Semiconductor Industry ◽  
Failure Mechanisms ◽  
Metal Deposition ◽  
Reliability Data ◽  
Interconnect Delay ◽  
Circuit Delay ◽  
Metal Interconnects ◽  
Damascene Interconnects ◽  
Low K

AbstractPhysical and statistical models have been used extensively to understand and improve electromigration and stress migration induced damage in narrow metal interconnects. As devices continue to shrink, and the interconnect delay becomes a more important fraction of overall circuit delay, the semiconductor industry has begun to make several important changes to the ‘standard’ Al-based interconnect technologies, including (i) a move from metal deposition and metal etch to metal deposition into damascene and dual-damascene structures, (ii) a move from Al-based to Cu-based metallizations, and (iii) a move from oxide to low-k dielectrics between the metal interconnects. The dominant electromigration and stress migration failure mechanisms associated with these advanced interconnect structures are typically different from the failure mechanisms associated with standard Al-based interconnects. In this work, physical and statistical models are used in conjunction with reliability data to compare the failure mechanisms in standard, Al-based interconnects with Cu-based, damascene interconnects. Methods are discussed for determining the dominant failure mechanisms and improving reliability in both types of interconnect.

Single Via Deprocessing Techniques to Enable Physical Analysis for Semiconductor Process Integration

2005 ◽  
Author(s):  
Jacob E. Hammett ◽  
Wentao Qin ◽  
David Theodore
Keyword(s):  
Sample Preparation ◽  
Cross Section ◽  
Process Optimization ◽  
Defect Formation ◽  
Process Integration ◽  
Semiconductor Devices ◽  
Failure Mechanisms ◽  
Test Structure ◽  
Wet Etching ◽  
Physical Analysis

Abstract Modern semiconductor devices are continuing to be scaled down and the complexity of the processes involved in producing the devices keeps increasing; in conjunction with this, sample preparation and analysis are increasingly important for accurately determining the sources of defects and failure mechanisms in terms of process integration. This paper discusses ways to characterize integration-driven defects using deprocessing techniques and cross-section imaging to obtain 3-D views of such defects. As an example, a single-via test structure is evaluated. The article focuses on the techniques used to deprocess the single-via structure using a combination of RIE, FIB, and wet etching to expose the single via while maintaining the integrity of the structure. The resulting 3-D view of the structure and associated defect allowed for improved understanding of the defect and its origin. This understanding enabled process optimization to minimize such defect formation.

Electron Probe Analysis of Vertebrate Smooth Muscle: Distribution of Ca and Ci

1976 ◽  
Vol 34 ◽  
pp. 334-335 ◽  
Author(s):  
Avril V. Somlyo ◽  
H. Shuman ◽  
A.P. Somlyo
Keyword(s):  
Smooth Muscle ◽  
Electron Probe ◽  
Preliminary Report ◽  
Cell Damage ◽  
Electron Probe Analysis ◽  
Perinuclear Space ◽  
Probe Analysis ◽  
High K ◽  
Low K ◽  
Initial Results

This is a preliminary report of electron probe analysis of rabbit portal-anterior mesenteric vein (PAMV) smooth muscle cryosectioned without fixation or cryoprotection. The instrumentation and method of electron probe quantitation used (1) and our initial results with cardiac (2) and skeletal (3) muscle have been presented elsewhere.In preparations depolarized with high K (K2SO4) solution, significant calcium peaks were detected over the sarcoplasmic reticulum (Fig 1 and 2) and the continuous perinuclear space. In some of the fibers there were also significant (up to 200 mM/kg dry wt) calcium peaks over the mitochondria. However, in smooth muscle that was not depolarized, high mitochondrial Ca was found in fibers that also contained elevated Na and low K (Fig 3). Therefore, the possibility that these Ca-loaded mitochondria are indicative of cell damage remains to be ruled out.

On the role of tin underlays for the prevention of thermal grooving in thin gold films

1986 ◽  
Vol 44 ◽  
pp. 732-733
Author(s):  
Jin Young Kim ◽  
R. E. Hummel ◽  
R. T. DeHoff
Keyword(s):  
Thin Film ◽  
Free Surface ◽  
Grain Boundary ◽  
Beneficial Effect ◽  
Failure Mechanism ◽  
Failure Mechanisms ◽  
Distinct Advantage ◽  
Gold Films ◽  
Gold Thin Film

Gold thin film metallizations in microelectronic circuits have a distinct advantage over those consisting of aluminum because they are less susceptible to electromigration. When electromigration is no longer the principal failure mechanism, other failure mechanisms caused by d.c. stressing might become important. In gold thin-film metallizations, grain boundary grooving is the principal failure mechanism.Previous studies have shown that grain boundary grooving in gold films can be prevented by an indium underlay between the substrate and gold. The beneficial effect of the In/Au composite film is mainly due to roughening of the surface of the gold films, redistribution of indium on the gold films and formation of In2O3 on the free surface and along the grain boundaries of the gold films during air annealing.

Real-time cryo-deformation of polypropylene and impact-modified polypropylene in the transmission electron microscope

1993 ◽  
Vol 51 ◽  
pp. 892-893
Author(s):  
Robert C. Cieslinski ◽  
H. Craig Silvis ◽  
Daniel J. Murray
Keyword(s):  
Electron Microscope ◽  
Transmission Electron Microscope ◽  
Failure Mechanisms ◽  
Brittle Transition ◽  
Molded Part ◽  
Transmission Electron ◽  
Solvent Cast ◽  
The Impact ◽  
Annealed Copper ◽  
Dynamic Plane

An understanding of the mechanical behavior polymers in the ductile-brittle transition region will result in materials with improved properties. A technique has been developed that allows the realtime observation of dynamic plane stress failure mechanisms in the transmission electron microscope. With the addition of a cryo-tensile stage, this technique has been extented to -173°C, allowing the observation of deformation during the ductile-brittle transition.The technique makes use of an annealed copper cartridge in which a thin section of bulk polymer specimen is bonded and plastically deformed in tension in the TEM using a screw-driven tensile stage. In contrast to previous deformation studies on solvent-cast films, this technique can examine the frozen-in morphology of a molded part.The deformation behavior of polypropylene and polypropylene impact modified with EPDM (ethylene-propylene diene modified) and PE (polyethylene) rubbers were investigated as function of temperature and the molecular weight of the impact modifier.

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