Automatic DRAM cell location in the SEM

Proceedings of the 1999 7th International Symposium on the Physical and Failure Analysis of Integrated Circuits (Cat. No.99TH8394) ◽

10.1109/ipfa.1999.791315 ◽

1999 ◽

Cited By ~ 1

Author(s):

J.T.L. Thong ◽

Y. Zhu ◽

J.C.H. Phang

Download Full-text