The effect of nitrogen pre-annealing on the sidewall oxidation of WSi/sub x/ and on the related electrical properties of WSi/sub x//poly Si gate structure
2004 ◽
Vol 22
(3)
◽
pp. 636
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Keyword(s):
2003 ◽
Vol 82
(3)
◽
pp. 501-504
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1992 ◽
Vol 50
(2)
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pp. 1338-1339
1992 ◽
Vol 50
(2)
◽
pp. 1422-1423
1990 ◽
Vol 48
(4)
◽
pp. 698-699
1984 ◽
Vol 98
(1)
◽
pp. 131-137