Composition and nanostructure of carbon/silicon graded film produced by ionization-assisted deposition

Digest of Papers. 2004 International Microprocesses and Nanotechnology Conference, 2004. ◽

10.1109/imnc.2004.245652 ◽

2004 ◽

Author(s):

T. Mano ◽

O. Sugiyama ◽

Y. Shibuya ◽

H. Nakayama ◽

O. Takai

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