Monte Carlo simulation study of local critical dimension error on mask and wafer

2004 ◽  
Author(s):  
Byoungsup Ahn ◽  
Joon-Soo Park ◽  
Seong-Woon Choi ◽  
Jung-Min Sohn
Keyword(s):  
Monte Carlo Simulation ◽  
Monte Carlo ◽  
Simulation Study ◽  
Critical Dimension ◽  
Monte Carlo Simulation Study

Monte Carlo Simulation Study of Local Critical Dimension Error on Mask and Wafer

2004 ◽  
Vol 43 (6B) ◽  
pp. 3689-3691 ◽  
Author(s):  
Byoung-sup Ahn ◽  
Joon-Soo Park ◽  
Seong-Woon Choi ◽  
Jung-Min Sohn
Keyword(s):  
Monte Carlo Simulation ◽  
Monte Carlo ◽  
Simulation Study ◽  
Critical Dimension ◽  
Monte Carlo Simulation Study
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