Formation of textured TiN-layers on Si by metal plasma immersion ion implantation and deposition

2003 ◽  
Author(s):  
P. Huber ◽  
D. Manova ◽  
S. Mandl ◽  
W. Assmann ◽  
B. Rauschenbach
Keyword(s):  
Ion Implantation ◽  
Metal Plasma ◽  
Plasma Immersion Ion Implantation

A high voltage pulse power supply for metal plasma immersion ion implantation and deposition

2010 ◽  
Vol 81 (12) ◽  
pp. 124703 ◽  
Author(s):  
M. C. Salvadori ◽  
F. S. Teixeira ◽  
W. W. R. Araújo ◽  
L. G. Sgubin ◽  
N. S. Sochugov ◽  
...  
Keyword(s):  
Ion Implantation ◽  
High Voltage ◽  
Power Supply ◽  
Voltage Pulse ◽  
High Voltage Pulse ◽  
Pulse Power ◽  
Pulse Power Supply ◽  
Metal Plasma ◽  
Plasma Immersion Ion Implantation

Two-dimensional texture and sheath evolution in metal plasma immersion ion implantation

2005 ◽  
Vol 200 (1-4) ◽  
pp. 589-593 ◽  
Author(s):  
S. Mändl ◽  
G. Thorwarth ◽  
B. Stritzker ◽  
B. Rauschenbach
Keyword(s):  
Ion Implantation ◽  
Two Dimensional ◽  
Metal Plasma ◽  
Plasma Immersion Ion Implantation
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