GaN-based multi-junction diode with low reverse leakage current using P-type barrier controlling layer

2011 ◽  
Author(s):  
Daisuke Shibata ◽  
Kazuhiro Kaibara ◽  
Tomohiro Murata ◽  
Yasuhiro Yamada ◽  
Tatsuo Morita ◽  
...  
Keyword(s):  
Leakage Current ◽  
Reverse Leakage Current ◽  
Junction Diode ◽  
P Type

Characteristics of Trench-Refilled 4H-SiC P-N Junction Diodes Fabricated by Selective Epitaxial Growth

2005 ◽  
Vol 483-485 ◽  
pp. 159-162 ◽  
Author(s):  
Can Hua Li ◽  
Peter A. Losee ◽  
Joseph Seiler ◽  
T. Paul Chow ◽  
I. Bhat
Keyword(s):  
Epitaxial Growth ◽  
Leakage Current ◽  
Nitrogen Doping ◽  
Room Temperature ◽  
Optical Microscope ◽  
Dominant Mechanism ◽  
Selective Epitaxial Growth ◽  
Reverse Leakage Current ◽  
Current Voltage ◽  
P Type

Selective nitrogen doping of 4H-SiC by epitaxial growth using TaC as the high temperature mask has been demonstrated. Nomarski optical microscope and scanning electron microscope (SEM) were used to characterize selective growth of SiC. In addition, 250µm square shaped p-n junction diodes by selective n type epitaxial growth on p type epi layer were fabricated. The refilled fingers with different width were designed to vary the periphery/area (P/A) ratio. The effects of P/A ratio on the current-voltage (J-V) characteristics have been investigated. The ideality factor extracted from J-V characteristics is ≈2 at temperature range of 25-275°C, which indicates that the Shockley-Read-Hall recombination is the dominant mechanism in the conduction region. The reverse leakage current did not show dependence on P/A ratio for trench refilled diodes. The room temperature reverse leakage current density at 100V is less than 3.5×10-7 A/cm2 for all diodes. Also, the reverse leakage current did not increase significantly with temperature up to 275°C. The breakdown voltages measured at room temperature are about 450V and 400V for diodes without and with fingers, respectively.

β-Ga2O3 hetero-junction barrier Schottky diode with reverse leakage current modulation and BV2/Ron,sp value of 0.93 GW/cm2

2021 ◽  
Vol 118 (12) ◽  
pp. 122102
Author(s):  
Qinglong Yan ◽  
Hehe Gong ◽  
Jincheng Zhang ◽  
Jiandong Ye ◽  
Hong Zhou ◽  
...  
Keyword(s):  
Leakage Current ◽  
Schottky Diode ◽  
Current Modulation ◽  
Reverse Leakage Current

Structural and Electrical Characterization of Si-Implanted TiN as a Diffusion Barrier for Cu Metallization

1995 ◽  
Vol 391 ◽  
Author(s):  
W.F. Mcarthur ◽  
K.M. Ring ◽  
K.L. Kavanagh
Keyword(s):  
Leakage Current ◽  
Diffusion Barrier ◽  
Depth Profiling ◽  
Electrical Characterization ◽  
Implantation Dose ◽  
Cu Metallization ◽  
Reverse Leakage Current ◽  
Transmission Electron ◽  
Current Voltage

AbstractThe feasibility of Si-implanted TiN as a diffusion barrier between Cu and Si was investigated. Barrier effectiveness was evaluated via reverse leakage current of Cu/TixSiyNz/Si diodes as a function of post-deposition annealing temperature and time, and was found to depend heavily on the film composition and microstructure. TiN implanted with Si28, l0keV, 5xl016ions/cm2 formed an amorphous ternary TixSiyNz layer whose performance as a barrier to Cu diffusion exceeded that of unimplanted, polycrystalline TiN. Results from current-voltage, transmission electron microscopy (TEM), and Auger depth profiling measurements will be presented. The relationship between Si-implantation dose, TixSiyNz structure and reverse leakage current of Cu/TixSiyNz/Si diodes will be discussed, along with implications as to the suitability of these structures in Cu metallization.

Electrical Characteristics of Large Chip-Size 3.3 kV SiC-JBS Diodes

2013 ◽  
Vol 740-742 ◽  
pp. 881-886 ◽  
Author(s):  
Hiroyuki Okino ◽  
Norifumi Kameshiro ◽  
Kumiko Konishi ◽  
Naomi Inada ◽  
Kazuhiro Mochizuki ◽  
...  
Keyword(s):  
Electric Field ◽  
Schottky Barrier ◽  
Leakage Current ◽  
Reverse Current ◽  
Tunneling Current ◽  
Leakage Currents ◽  
Reverse Leakage Current ◽  
Low Leakage ◽  
Chip Size ◽  
Barrier Metal

The reduction of reverse leakage currents was attempted to fabricate 4H-SiC diodes with large current capacity for high voltage applications. Firstly diodes with Schottky metal of titanium (Ti) with active areas of 2.6 mm2 were fabricated to investigate the mechanisms of reverse leakage currents. The reverse current of a Ti Schottky barrier diode (SBD) is well explained by the tunneling current through the Schottky barrier. Then, the effects of Schottky barrier height and electric field on the reverse currents were investigated. The high Schottky barrier metal of nickel (Ni) effectively reduced the reverse leakage current to 2 x 10-3 times that of the Ti SBD. The suppression of the electric field at the Schottky junction by applying a junction barrier Schottky (JBS) structure reduced the reverse leakage current to 10-2 times that of the Ni SBD. JBS structure with high Schottky barrier metal of Ni was applied to fabricate large chip-size SiC diodes and we achieved 30 A- and 75 A-diodes with low leakage current and high breakdown voltage of 4 kV.

Illumination Dependence of Reverse Leakage Current in Silicon Solar Cells

2021 ◽  
pp. 1-6
Author(s):  
Carlos Enrico Clement ◽  
Jai Prakash Singh ◽  
Erik Birgersson ◽  
Yan Wang ◽  
Yong Sheng Khoo
Keyword(s):  
Solar Cells ◽  
Leakage Current ◽  
Silicon Solar Cells ◽  
Reverse Leakage Current
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