Feedback control design for cluster tools with wafer residency time constraints

2012 IEEE International Conference on Systems, Man, and Cybernetics (SMC) ◽

10.1109/icsmc.2012.6378261 ◽

2012 ◽

Cited By ~ 4

Author(s):

Chulhan Kim ◽

Tae-Eog Lee

Keyword(s):

Feedback Control ◽

Control Design ◽

Time Constraints ◽

Cluster Tools ◽

Residency Time

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Petri Net Modeling and Wafer Sojourn Time Analysis of Single-Arm Cluster Tools With Residency Time Constraints and Activity Time Variation

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2012.2199338 ◽

2012 ◽

Vol 25 (3) ◽

pp. 432-446 ◽

Cited By ~ 60

Author(s):

Yan Qiao ◽

NaiQi Wu ◽

MengChu Zhou

Keyword(s):

Petri Net ◽

Time Variation ◽

Sojourn Time ◽

Time Constraints ◽

Time Analysis ◽

Activity Time ◽

Cluster Tools ◽

Residency Time

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A novel failure response policy for single-arm cluster tools with residency time constraints

2014 IEEE International Conference on Systems, Man, and Cybernetics (SMC) ◽

10.1109/smc.2014.6973894 ◽

2014 ◽

Author(s):

Yan Qiao ◽

NaiQi Wu ◽

ChunRong Pan ◽

MengChu Zhou

Keyword(s):

Time Constraints ◽

Cluster Tools ◽

Response Policy ◽

Residency Time

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Schedulability and Scheduling Analysis of Dual-Arm Cluster Tools with Wafer Revisiting and Residency Time Constraints Based on a Novel Schedule

IEEE Transactions on Systems Man and Cybernetics Systems ◽

10.1109/tsmc.2014.2347928 ◽

2015 ◽

Vol 45 (3) ◽

pp. 472-484 ◽

Cited By ~ 24

Author(s):

Yan Qiao ◽

NaiQi Wu ◽

MengChu Zhou

Keyword(s):

Time Constraints ◽

Scheduling Analysis ◽

Cluster Tools ◽

Dual Arm ◽

Residency Time

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A Novel Algorithm for Wafer Sojourn Time Analysis of Single-Arm Cluster Tools With Wafer Residency Time Constraints and Activity Time Variation

IEEE Transactions on Systems Man and Cybernetics Systems ◽

10.1109/tsmc.2014.2368995 ◽

2015 ◽

Vol 45 (5) ◽

pp. 805-818 ◽

Cited By ~ 15

Author(s):

ChunRong Pan ◽

Yan Qiao ◽

NaiQi Wu ◽

MengChu Zhou

Keyword(s):

Time Variation ◽

Sojourn Time ◽

Time Constraints ◽

Time Analysis ◽

Activity Time ◽

Cluster Tools ◽

Residency Time ◽

Novel Algorithm

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Schedulability and Scheduling of Dual-Arm Cluster Tools with Residency Time Constraints Based on Petri Net

2006 IEEE International Conference on Automation Science and Engineering ◽

10.1109/coase.2006.326860 ◽

2006 ◽

Cited By ~ 11

Author(s):

Naiqi Wu ◽

Mengchu Zhou

Keyword(s):

Petri Net ◽

Time Constraints ◽

Cluster Tools ◽

Dual Arm ◽

Residency Time

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Scheduling of Single-Arm Multi-cluster Tools With Wafer Residency Time Constraints in Semiconductor Manufacturing

IEEE Transactions on Semiconductor Manufacturing ◽

10.1109/tsm.2014.2375880 ◽

2015 ◽

Vol 28 (1) ◽

pp. 117-125 ◽

Cited By ~ 37

Author(s):

QingHua Zhu ◽

NaiQi Wu ◽

Yan Qiao ◽

MengChu Zhou

Keyword(s):

Semiconductor Manufacturing ◽

Time Constraints ◽

Cluster Tools ◽

Residency Time

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Scheduling dual-arm cluster tools with multiple wafer types and residency time constraints

IEEE/CAA Journal of Automatica Sinica ◽

10.1109/jas.2020.1003150 ◽

2020 ◽

Vol 7 (3) ◽

pp. 776-789 ◽

Cited By ~ 1

Author(s):

Jipeng Wang ◽

Hesuan Hu ◽

Chunrong Pan ◽

Yuan Zhou ◽

Liang Li

Keyword(s):

Time Constraints ◽

Cluster Tools ◽

Dual Arm ◽

Residency Time

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Scheduling of Dual-Arm Cluster Tools With Wafer Revisiting and Residency Time Constraints

IEEE Transactions on Industrial Informatics ◽

10.1109/tii.2013.2272702 ◽

2014 ◽

Vol 10 (1) ◽

pp. 286-300 ◽

Cited By ~ 51

Author(s):

Yan Qiao ◽

Naiqi Wu ◽

Meng Chu Zhou

Keyword(s):

Time Constraints ◽

Cluster Tools ◽

Dual Arm ◽

Residency Time

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Response Policies to Process Module Failure in Single-Arm Cluster Tools Subject to Wafer Residency Time Constraints

IEEE Transactions on Automation Science and Engineering ◽

10.1109/tase.2014.2312823 ◽

2015 ◽

Vol 12 (3) ◽

pp. 1125-1139 ◽

Cited By ~ 29

Author(s):

Yan Qiao ◽

Chun-Rong Pan ◽

Nai-Qi Wu ◽

MengChu Zhou

Keyword(s):

Time Constraints ◽

Cluster Tools ◽

Residency Time

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Modeling and schedulability analysis of single-arm multi-cluster tools with residency time constraints via Petri nets

2014 IEEE International Conference on Automation Science and Engineering (CASE) ◽

10.1109/coase.2014.6899308 ◽

2014 ◽

Cited By ~ 5

Author(s):

QingHua Zhu ◽

NaiQi Wu ◽

Yan Qiao ◽

MengChu Zhou

Keyword(s):

Petri Nets ◽

Schedulability Analysis ◽

Time Constraints ◽

Cluster Tools ◽

Residency Time

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