CMOS Gate Oxide Integrity Failure Structure Analysis Using Transmission Electron Microscopy

2006 ◽  
Author(s):  
Y. Li ◽  
S. Tan ◽  
H. Kuan ◽  
K. Tan ◽  
L. Duan
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Structure Analysis ◽  
Gate Oxide ◽  
Transmission Electron ◽  
Gate Oxide Integrity

scholarly journals Structure Analysis of FeSi2 Embeded in Si by Transmission Electron Microscopy;

Materia Japan ◽  
2001 ◽  
Vol 40 (12) ◽  
pp. 1013-1013
Author(s):  
Toyohiro Chikyo ◽  
Tamami Naruke ◽  
Parhat Ahmet ◽  
Min Zhu ◽  
Takashi Suemasu ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Structure Analysis ◽  
Transmission Electron

Recent Developments in TEM Applications for the IC Industry

2008 ◽  
Author(s):  
L. F. Fu ◽  
Y. C. Wang ◽  
B. Jiang ◽  
F. Shen ◽  
M. Strauss ◽  
...  
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Gate Oxide ◽  
Transmission Electron Microscopy Image ◽  
New Developments ◽  
Electron Microscopy Image ◽  
Transmission Electron ◽  
Microscopy Image ◽  
Recent Developments ◽  
Aberration Corrected

Abstract Recent developments in aberration-corrected transmission electron microscopy have drawn much attention from the semiconductor characterization community. Two new developments in transmission electron microscopy, image aberration correctors and probe aberration correctors, are discussed in term of their applications in characterizing gate oxide dielectrics for the IC industry.

Atomistic Structure Analysis Of 3C-SiC/Si(001) Interface And Stacking Faults By Aberration-Corrected Transmission Electron Microscopy

2012 ◽  
Vol 18 (S2) ◽  
pp. 514-515
Author(s):  
J. Yamasaki ◽  
N. Tanaka ◽  
S. Inamoto ◽  
Y. Nomura ◽  
K. Okazaki-Maeda
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Structure Analysis ◽  
Stacking Faults ◽  
Transmission Electron ◽  
Atomistic Structure ◽  
Aberration Corrected

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.

Sign in / Sign up

Export Citation Format

Share Document