A nodal analysis model for out-of-plane beamshaped electrothermal microactuators
2008 ◽
Vol 15
(2)
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pp. 217-225
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2011 ◽
Vol 378-379
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pp. 332-336
Keyword(s):
2014 ◽
Vol 1078
◽
pp. 201-205
2010 ◽
Vol 88
(11-12)
◽
pp. 690-717
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2010 ◽
Vol 452-453
◽
pp. 165-168
Keyword(s):
Keyword(s):